基于构造运动光场的高精度直线时栅位移传感器研究

发布时间：2018-07-31 19:51

【摘要】：精密位移测量是精密制造运行过程中最关键的物理量测量,也是产品质量保证的重要手段。常见精密位移测量以光学测量为主,其中以激光干涉仪和光栅传感器为最主要的两种测量方式。激光干涉仪价格昂贵且对环境要求高,而高精度光栅对基础设施、制造工艺要求高,并且国外对我国实行严格技术封锁,导致我国光学精密测量技术及设备远远落后于先进技术水平。基于此,本文在国家自然科学基金的资助下开展了构造运动光场的直线时栅位移传感器研究。利用国内相对落后的光栅制作工艺和基础设施,研制一种可以媲美国外高精度光栅的位移传感器。主要研究内容和创新点如下:(1)将形式各异的位移测量方法,归纳成两种主要的数学模型,并对其位移测量特征进行分析;同时归纳总结了时栅位移测量的数学模型,并解释了时栅以“时间戳”实现位移测量的本质特征。(2)从旋转磁场产生原理出发,提出在光学领域对光强用精确的空间和时间调制,实现高精度运动光场的构建的方法。并设计一种光敏阵列直接调制的单栅式时栅传感器样机,用实验验证了这种利用光强空间和时间调制实现位移测量方案的可行性。(3)开展LED准直光源设计、仿真和制作研究工作。根据LED点光源特征,结合仿真软件对光源模型进行仿真,并提出采用自由曲面准直透镜设计方法,对LED进行二次配光设计。通过搭建3D仿真模型仿真、透镜实际制作和光源效果测试,完成了四组出光角度±10°的准直光源设计与制作。(4)研究了高精度运动光场产生及控制方法。主要包括传感器透光面空间结构设计、光源设计、高精度交变光场产生及高精度光电转换电路设计等,为如何获取高精度运动光场提供了依据。对最终合成运动光场的性能,在两种不同结构的传感器样机上分别进行了测试,验证了以上控制方法的可行性。(5)开展了两种结构时栅传感器的实验研究工作,分别检验构造运动光场实现位移测量的实际效果和传感器样机的工作性能。对影响构造运动光场直线时栅传感器系统的主要误差源进行了分析和计算,并提出硬件和直线插补的软件相结合的误差修正方法。实验结果表明,在150mm量程范围内,四相透光式时栅测量准确度为±0.45μm,三相差动透光式时栅测量准确度为±0.4μm。(6)研究提高系统稳定性的方法。对不同对极数、差动结构的传感器系统稳定性进行对比测量,并提出递推平均滤波的数字滤波方法,以提高系统稳定性。实验证明,采用差动结构、多对极平均效应、递推平均算法等方法后,可以获取一个高稳定性的测量系统。综上所述,本文结合时栅测量原理,在光学领域提出用光强时空正交调制合成运动光场实现精密位移测量的方法,基于此方法,设计并研制了两种不同结构的光场式时栅传感器。实验研究表明,所研制的光场式时栅传感器具有制造成本低,而测量精度高、稳定性好的优点。因此,本文的研究,不仅为时栅传感器构建了一个“光-电-磁”的完整研究体系,而且为光学位移测量提供了一种不依赖精密制造工艺,实现精密位移测量的新型测量方法。
[Abstract]:Precision displacement measurement is the most important measure of physical quantity in the operation of precision manufacturing, and it is also an important means of product quality assurance. The common precision displacement measurement is mainly optical measurement, in which laser interferometer and grating sensor are the two most important measurement methods. The laser interferometer is expensive and high in environment and high precision. The grating has high requirements for infrastructure, manufacturing technology and strict technical blockade in our country. The optical precision measurement technology and equipment in our country are far behind the advanced technology level. Based on this, this paper has carried out a linear time grating displacement sensor of the structural movement light field under the support of the National Natural Science Foundation. A relatively backward grating fabrication technology and infrastructure are developed to develop a displacement sensor which can match the high precision grating of foreign countries. The main research content and innovation points are as follows: (1) the displacement measurement methods of different forms are summed up into two main mathematical models, and their displacement measurement characteristics are analyzed; and the time grid is summarized and summarized. The mathematical model of displacement measurement is made and the essential characteristics of displacement measurement are realized by time stamp. (2) from the principle of rotating magnetic field, a method of precise space and time modulation in the field of optical intensity is proposed to realize the construction of high precision moving light field. The gate sensor prototype has verified the feasibility of using the light intensity space and time modulation to realize the displacement measurement scheme. (3) carry out the design, simulation and research work of the LED collimation light source. According to the characteristics of the LED point light source, the simulation software is used to simulate the light source model, and the design method of the free surface collimation lens is proposed, and the L is designed. ED carries out two light matching design. Through the simulation of 3D simulation model, the actual fabrication of lens and the test of light source effect, the design and production of four groups of collimating light sources with light angle of 10 degrees are completed. (4) the production and control methods of high precision moving light field are studied. The design of the spatial structure of the transmittance surface of the sensor, the design of the light source and the high precision alternating light are mainly included. The field generation and the high precision photoelectric conversion circuit design provide the basis for how to obtain the high precision moving light field. The performance of the final synthetic motion light field is tested on the two different structure sensor prototype, and the feasibility of the above control method is verified. (5) the experimental research work of two kinds of structure time grating sensors is carried out. The actual effect of the displacement measurement and the working performance of the sensor prototype are tested respectively. The main error sources of the grating sensor system which affect the straight line of the structural motion light field are analyzed and calculated, and the error correction method combined with the software of the hardware and the linear interpolation is put forward. The experimental results show that the 150mm quantity is at the same time. Within the range, the accuracy of the four phase transmittance grating measurement is + 0.45 m, and the accuracy of the three phase differential transmittance grating measurement is + 0.4 M. (6) to improve the stability of the system. The stability of the sensor systems with different opposite poles and differential structures is compared and measured, and the digital filtering method of recursive mean filtering is proposed to improve the system. The experimental results show that a high stability measurement system can be obtained by using the differential structure, the multiple pairs of polar mean effects and the recursive mean algorithm. In the light of the principle of the time grating measurement, this paper proposes a method for the precision displacement measurement by using the optical intensity space-time orthogonal modulation to synthesize the moving light field, based on this method. Two kinds of light field type time grating sensors are designed and developed. The experimental study shows that the developed light field grating sensor has the advantages of low manufacturing cost, high measurement precision and good stability. Therefore, this paper not only constructs a complete study system of "light electric magnetic" for the time grid sensor, but also is the light of light field sensor. Degree shift measurement provides a new measurement method without precise manufacturing technology to achieve precise displacement measurement.
【学位授予单位】：重庆大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TP212

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