微环谐振腔在硅基光子集成器件中应用的研究

发布时间：2018-11-06 15:59

【摘要】：信息技术的发展使得人类的生活发生了巨大的变化,信息数据大批量增加,对信息容量、速度以及成本等都有更高的要求。硅基光电集成技术以其先进成熟的CMOS工艺技术、价格低廉、带宽大、损耗低以及抗干扰性的优势,成为了当前研究热点。针对硅基片上光电集成技术的发展和重大应用背景,利用硅基光波导器件与发光材料混合集成,开展可用于片上光互连的高性能光源及光子集成器件有着非常重要的意义,是国家的重大需求所在。本学位论文以硅基微环谐振腔为基本单元,利用其体积小、结构简单、易调谐等特性,构建了几种可用于硅基混合外腔激光器的可调谐微环反射腔镜,搭建了硅基混合外腔激光器,研制了一种基于微环耦合系数可调与MZI混合结构的带宽可调滤波器,并对这些结构进行了理论研究和实验验证。主要的创新性工作和研究内容包括：1.利用微环谐振腔的可调特性和滤波特性,结合片上光互连用光源对谐振腔单色性、可调谐性等要求,本论文设计并实验制作了五种基于单环的反射腔镜和三种基于双环的反射腔镜。实验测得反射率最高为95%,最低为80%,均可以满足硅基混合外腔激光器对谐振腔的要求,并讨论分析了影响器件反射率的因素。2.采用RSOA与实验制作的几种硅基微环外谐振腔相结合,实现了硅基混合外反射腔型激光器和可调谐激光器,激光器输出功率达到mw量级,边模抑制比均在30 dB以上。通过对谐振腔的热电极加热可实现一个FSR范围的波长调谐,中心波长可调谐效率为6.4mW/nm。3.利用耦合模理论和微环谐振腔的可调特性及相干叠加特性,提出了一种基于微环耦合系数可调和MZI混合结构的带宽可调滤波器,并对微环耦合系数可调和MZI混合结构实现带宽可调的原理进行了详细的理论分析,对出现的Fano现象进行了仿真分析和实验论证。实验制作的器件尺寸为1.25mm × 0.8mm,测试结果可得其带宽可调范围为0.46nm～3.09nm (57.5GHz～386.25GHz)。
[Abstract]:With the development of information technology, the human life has changed greatly, the information data has increased in large quantities, and there are higher requirements for information capacity, speed and cost. Silicon based optoelectronic integrated technology has become a research hotspot with its advantages of advanced and mature CMOS technology, low price, large bandwidth, low loss and anti-interference. In view of the development and important application background of optoelectronic integration technology on silicon substrate, it is of great significance to develop high performance light source and photonic integrated device which can be used for on-chip optical interconnection by using silicon-based optical waveguide devices and luminescent materials. Is the great demand of the country. In this dissertation, based on the characteristics of small size, simple structure and easy tuning, several kinds of tunable microloop mirrors for silicon based hybrid external cavity lasers are constructed, which are based on silicon based microring resonators. A silicon-based hybrid external cavity laser is built and a bandwidth-tunable filter based on the tunable microloop coupling coefficient and MZI hybrid structure is developed. The theoretical research and experimental verification of these structures are carried out. The main innovative work and research contents include: 1. Based on the tunable and filtering characteristics of the microring resonator and the requirements of the on-chip optical interconnection light source for the monochromism and tunability of the resonator, In this paper, five mirrors based on single ring and three mirrors based on double loop are designed and experimented. Experimental results show that the highest reflectivity is 95 and the lowest is 80. Both of them can meet the requirements of silicon based hybrid external cavity lasers for resonators. The factors affecting the reflectivity of the devices are discussed and analyzed. 2. With the combination of RSOA and several kinds of silicon based microring external resonators, the Si-based hybrid external reflection cavity laser and tunable laser are realized. The output power of the laser reaches the order of mw and the side mode rejection ratio is above 30 dB. By heating the thermal electrode of the resonator, a wavelength tunable in the FSR range can be achieved, and the tunable efficiency of the center wavelength is 6.4 MW / nm.3. Based on the coupling mode theory and the tunable characteristics and coherent superposition characteristics of the microring resonator, a bandwidth-tunable filter based on the harmonic MZI hybrid structure with microloop coupling coefficient is proposed. The principle of tunable bandwidth of microloop coupling coefficient harmonic MZI hybrid structure is analyzed in detail, and the Fano phenomenon is simulated and proved by experiments. The size of the device is 1.25mm 脳 0.8mm, and the bandwidth of the device is adjustable in the range of 0.46nm~3.09nm (57.5GHz~386.25GHz).
【学位授予单位】：浙江大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN713;TN248

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