精密主动隔振台控制系统设计与研究

发布时间：2019-05-11 03:03

【摘要】：超精密加工、测量设备精度不断提高，对加工和测量环境要求也越来越高。地基振动是影响精度的一个重要因素。精密主动隔振台结合主动、被动隔振的优点，，在实现良好的隔振效果的同时可以获得更宽的隔振频带。控制系统是精密隔振台的重要组成部分，其性能优劣直接影响隔振台的隔振效果。本文以单自由度隔振台为研究对象，分析了单自由度主动隔振台的工作原理，对单自由度精密主动隔振台进行了理论建模，在此基础上设计了基于PID算法的反馈控制器和基于自适应算法的前馈控制器，并对前馈控制器进行了仿真实验。根据隔振系统的控制要求，设计了控制器总体硬件框架，提出了传感器模块、驱动模块和控制核心模块设计需求，并分别完成了传感器选型和对应信号处理电路设计，驱动模块选型设计，和控制核心模块选型设计。分析了隔振系统控制软件设计需求，选取Windows XPe+RTX作为软件开发环境，设计了控制软件总体框架，并从实时驱动模块、共享内存模块和人机交互模块进行了软件详细设计。最后介绍了实验台组成和测试方法，并对控制器和控制系统软硬件进行了实验测试。实验效果表明控制系统设计满足控制要求。
[Abstract]:Ultra-precision machining, the accuracy of measuring equipment is improving, and the requirements for machining and measuring environment are getting higher and higher. The vibration of foundation is an important factor affecting the accuracy. Combined with the advantages of active and passive vibration isolation, the precision active vibration isolation table can not only achieve good vibration isolation effect, but also obtain a wider vibration isolation frequency band. The control system is an important part of the precision vibration isolation table, and its performance directly affects the vibration isolation effect of the vibration isolation table. In this paper, taking the single-degree-of-freedom vibration isolation table as the research object, the working principle of the single-degree-of-freedom active vibration isolation table is analyzed, and the theoretical modeling of the single-degree-of-freedom precision active vibration isolation table is carried out. On this basis, the feedback controller based on PID algorithm and the feedforward controller based on adaptive algorithm are designed, and the simulation experiments of feedforward controller are carried out. According to the control requirements of the vibration isolation system, the overall hardware framework of the controller is designed, and the design requirements of the sensor module, the drive module and the control core module are put forward, and the sensor selection and corresponding signal processing circuit design are completed respectively. Drive module selection design, and control core module selection design. This paper analyzes the design requirements of vibration isolation system control software, selects Windows XPe RTX as the software development environment, designs the overall framework of the control software, and designs the software in detail from the real-time driving module, shared memory module and human-computer interaction module. Finally, the composition and test method of the experimental platform are introduced, and the hardware and software of the controller and control system are tested. The experimental results show that the design of the control system meets the control requirements.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2013
【分类号】：TB535.1

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