ZnO纳米阵列结构酒精气敏特性研究

发布时间：2018-01-11 12:06

本文关键词：ZnO纳米阵列结构酒精气敏特性研究　出处：《西安工业大学学报》2016年09期 　论文类型：期刊论文

更多相关文章： ZnO 纳米线阵列 酒敏性能 薄膜元件

【摘要】：为了提高ZnO气敏元件对酒精蒸汽的气敏响应,改善气敏元件的稳定性及耐久性,文中采用化学水热法在预处理后的陶瓷管电极表面生长ZnO纳米阵列材料,通过退火处理后得到薄膜ZnO气敏元件.借助X射线衍射仪和扫描电子显微镜对所得产物的晶体结构和形貌进行表征.采用静态配气法对其进行不同浓度(1×10-4,2×10-4,5×10-4,1×10-3)的酒精蒸汽气敏性能测试.实验结果表明:该结构为分散均匀的ZnO纳米线阵列状结构,该纳米结构薄膜气敏元件具有较好的气敏性能,具有较快的响应及恢复.随环境中酒精蒸汽浓度的增加,其气敏性能逐步提升,在5×10-4酒精蒸汽气敏浓度下气敏性能达到峰值.不同浓度条件下,气敏响应及恢复时间不同,在1×10-4条件下度响应时间最快,1×10-3浓度下恢复时间最快,2×10-4浓度下响应恢复时间最均衡.
[Abstract]:In order to improve the gas sensing response of ZnO gas sensor to alcohol vapor, and improve the stability and durability of gas sensor. In this paper, ZnO nanoarrays were grown on the surface of ceramic tube electrode by chemical hydrothermal method. The thin film ZnO gas sensor was obtained by annealing. The crystal structure and morphology of the product were characterized by X-ray diffractometer and scanning electron microscope. 1 脳 10-4. The gas sensing properties of alcohol vapor were measured by 2 脳 10-4 (5 脳 10-4) 1 脳 10-3). The experimental results show that the structure is a well-dispersed ZnO nanowire array structure. The nanostructure thin film gas sensor has better gas sensing performance, and has a faster response and recovery. With the increase of alcohol vapor concentration in the environment, the gas sensing performance is gradually improved. The gas sensing performance reached the peak at 5 脳 10 ~ (-4) vapor gas sensitive concentration. Under different concentration, the gas sensitivity response and recovery time were different, and the degree response time was the fastest at 1 脳 10 ~ (-4). The fastest recovery time is at 1 脳 10 ~ (-3) concentration and the most balanced response time is at 2 脳 10 ~ (-4) concentration.
【作者单位】：西安工业大学理学院;西安石油大学理学院;
【基金】：陕西省教育厅科学研究基金(14JK1331)
【分类号】：TB383.1;TB381
【正文快照】： 一维氧化物纳米材料[1]由于其特殊的物理化学性质,引起研究者广泛关注.ZnO、SnO2、In2O3、WO3等半导体纳米材料受到较广泛和深入的研究.纳米材料逐渐被应用于各个科技领域,如场效应晶体管、燃料敏化太阳能电池、光催化、光伏器件及气敏传感器[2].关于ZnO纳米材料的相关研究较

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