甲烷流量对类富勒烯碳基薄膜结构与摩擦学性能的影响

发布时间：2018-01-13 13:20

本文关键词：甲烷流量对类富勒烯碳基薄膜结构与摩擦学性能的影响　出处：《人工晶体学报》2017年01期 　论文类型：期刊论文

【摘要】：以甲烷为前驱体,采用等离子体增强化学气相沉积(PECVD)技术沉积类富勒烯碳基(FL-C∶H)薄膜于单晶硅n-100基底材料表面。利用高分辨透射电镜(HRTEM)和拉曼光谱仪(Ramman)对薄膜的结构形貌进行表征;通过原位纳米力学测试系统和摩擦磨损试验机分析比较薄膜在不同甲烷流量的情况下的力学特征及摩擦学特性。实验结果表明:所制备的碳基薄膜具有类富勒烯纳米结构特征,甲烷流量对类富勒烯碳基薄膜(FL-C∶H)的结构和性能具有较大的影响;薄膜的弹性模量、硬度以及薄膜中的类富勒烯结构随着甲烷流量的增加而减小,但是摩擦系数对甲烷流量的变化不敏感。
[Abstract]:Methane as precursor. Plasma enhanced chemical vapor deposition (PECVD) technique was used to prepare fullerene-like carbon based FL-C: h films on the surface of monocrystalline silicon n-100 substrates. HRTEM) and Raman spectrometer (Ramman) were used to characterize the structure and morphology of the films. The mechanical and tribological properties of the films under different methane flow rates were analyzed and compared by in-situ nanomechanical testing system and friction and wear tester. The experimental results show that:. The prepared carbon-based films have the characteristics of fullerene-like nanostructures. The flow rate of methane has great influence on the structure and properties of fullerene-like carbon based thin film FL-C: h). The elastic modulus, hardness and fullerene-like structure of the film decrease with the increase of methane flux, but the friction coefficient is not sensitive to the change of methane flux.
【作者单位】：西安航空学院材料工程学院;中国科学院兰州化学物理研究所先进润滑与防护材料研发中心;
【基金】：西安航空学院校级科研基金(2016KY1209) 国家自然科学基金(51275508)
【分类号】：TB383.2
【正文快照】： Influence of Methane Flow Rate on the Structure and TribologicalProperties of Fullerene-like Hydrogenated Carbon Thin FilmsWU Kun-yao1,ZONG Yan-xu1,GONG Zhen-bin2,YANG Chang-qing1,Li Zhao1,LU Yuan-yuan1,MENG Zhi-xin1(1.School of Materials Engineering,Xi'

【相似文献】