穆勒矩阵椭偏测量实验平台设计与实现

发布时间：2018-01-16 14:24

本文关键词：穆勒矩阵椭偏测量实验平台设计与实现　出处：《华中科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：在纳米技术研究和纳米制造工艺等应用领域,纳米结构测量方法研究日显重要。在纳米测量实际操作中,不仅需要快捷、精确地测量出纳米结构重要三维形貌尺寸,同时需要尽可能减小对被测样品的破坏和污染。由于传统纳米结构测量手段无法同时满足上述两点,本学位论文在国家重大科学仪器设备开发专项的资助下,研究穆勒矩阵椭偏测量实验平台的设计与实现。主要工作如下:完成了一种双旋转补偿器的穆勒矩阵椭偏测量光路的设计,并通过分析比较关键元件选型,确定了光学硬件组成。重点介绍了光学硬件平台的设计,并结合光路设计和相应光学元件选型,将起偏光路和检偏光路最大程度的集成到一个光学平台上,并以此为基础开展测量实验平台控制单元的搭建和调试。完成了基于双旋转补偿器同步运动控制的设计与实现,即通过实时采集两个带动补偿器旋转的电机零位信号,当两个电机处于同步状态时,所设计的同步信号触发采集卡向光谱仪外部触发接口发出光谱采集信号,完成对测量数据精确的同步采集。在测量实验平台所需的光学硬件和控制方案搭建完成后,对整个测量实验平台进行集成调试和性能优化。首先以空气介质为测量对象,对测量实验平台的测量精度进行评估,同时对相应关键元件进行性能评估。然后对已知纳米结构特征的标准样件进行测量,通过分析测量数据,进一步排除影响实验平台测量精度的可能因素,以提高测量结果的准确性和可靠性。
[Abstract]:In the research of nanotechnology and nano manufacturing technology application, more and more research on nano structure measurement method. In nanometer measurement in the actual operation, not only the need for fast, accurate measurement of nanometer structure important 3D shape size, also need to minimize the measured sample damage and pollution. Because the traditional measurement methods to nano structure at the same time to meet the above two points, this thesis in the national key scientific instrument and equipment development projects funded by the research, design and implementation of the Muller matrix ellipsometry experiment platform. The main work is as follows: the Muller matrix of a double rotating compensator ellipsometer offset measurement optical path design, and through the analysis and comparison of key components selection, optical the hardware composition was determined. The paper mainly introduces the design of optical hardware platform, combined with the optical design and the corresponding optical element selection, will play a polarizing road and the partial seizure The maximum optical path integrated into an optical platform, and as a basis to build and debug the measurement platform control unit. The design and Realization of double synchronous rotating compensator based on motion control, through real-time acquisition of two rotating electric machine drives the compensator zero position signal, when the two motors are in sync when the synchronization signal acquisition card to design the trigger spectrometer external trigger interface to send signal spectrum, synchronous acquisition of accurate measurement data. The optical hardware and control scheme is required in the measurement experiment platform is built after the completion of the integration debugging and performance optimization of the measurement platform. The first to air medium for measurement object to evaluate the measurement accuracy of the experimental platform, and evaluate the performance of the corresponding key element. Then the known nanometer structure standard The sample is measured, and the possible factors that affect the accuracy of the experimental platform are further eliminated by analyzing the measured data, so as to improve the accuracy and reliability of the measurement results.

【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1

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