基于多孔薄膜的F-P型光纤相对湿度传感器研究

发布时间：2018-01-20 10:58

本文关键词： 光纤湿度传感器物理气相沉积薄膜毛细冷凝法布里-珀罗干涉　出处：《武汉理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：相比于传统湿度传感器,光纤湿度传感器具有结构紧凑、制备简单、湿敏性好、响应速度快、重复性良好和抗电磁干扰等许多优势。本课题将功能薄膜材料与光纤传感相结合,通过物理气相沉积法将湿敏薄膜沉积在光纤平整端面上,利用介质薄膜的干涉原理和微小孔隙的湿敏特性,制备了一种基于多孔薄膜的法布里-珀罗(Fabry-Perot)干涉型光纤相对湿度传感器。本文的主要研究工作如下:(1)分析课题研究背景:湿度传感研究的意义,湿度及相对湿度的定义,光纤湿度传感器的分类,国内外光纤湿度传感器的研究进展,以及本文所采用的实验方案。(2)干涉型光纤湿度传感器的原理分析和数值模拟:分析湿敏薄膜的传感机理和薄膜干涉传输的基本理论,对F-P干涉仪进行矩阵运算,模拟了确定孔隙分布、孔隙率和孔径大小的介质薄膜在不同湿度环境下所表现出的干涉谱,用来估算传感器的响应性能,为膜系的设计和传感器的制备工艺改进提供理论依据。(3)多层光学薄膜的膜系设计、制备和测试:介绍湿敏薄膜的膜系设计方案,比较彼此优劣;介绍光学薄膜常用的制备方法,本课题中使用的制备方法,设备和制备工艺,以及制备出来的湿敏薄膜的测试。(4)基于Ti O2/Si O2/Ti O2膜系的多孔薄膜F-P型光纤相对湿度传感器实验研究:介绍了传感器的制备方法和实验方法,实验研究了不同制备工艺的传感器在不同相对湿度下的响应特性。测试了最佳工艺下制备的传感器的湿度响应特性、重复性、响应时间、温度串扰,最后,重点研究了薄膜形貌、湿度敏感性和热处理对传感器稳定性的影响。并分别展示了由武汉计量测试技术研究院进行的光纤湿度传感器校准报告以及实际应用于绵阳中国工程物理研究院总体工程研究所的光纤湿度传感器测量校验结果。本文的创新点在于利用物理气相沉积的方法将多层干涉薄膜技术与光纤传感技术结合,而基于该种方式得到的湿度传感器较于其他光纤湿度传感器有突出的传感性能,尤其对于中低湿度的测量,具有极大的应用前景。
[Abstract]:Compared to the traditional humidity sensor, optical fiber sensor has the advantages of compact structure, simple preparation, good moisture sensitivity, fast response speed, good repeatability and anti electromagnetic interference and many other advantages. The functional film material and optical fiber sensing combined by physical vapor deposition method of humidity sensitive thin films deposited on flat end fiber on the humidity sensitive characteristics of interference principle and the micro pores of dielectric thin films, a porous film based on Fabri Perot prepared (Fabry-Perot) interferometric fiber optic humidity sensor. The main research work is as follows: (1) the analysis of the research background, research significance of humidity sensor, relative humidity and definition humidity, classification of optical fiber humidity sensor, domestic and foreign research progress of optical fiber sensor, and the experimental program. (2) numerical analysis and principle of interferometric fiber optic humidity sensor Simulation: the basic theory of the sensing mechanism and the analysis of thin film humidity sensitive thin film interference transmission, the F-P interferometer by matrix operation simulation to determine the pore size distribution, porosity and pore size of the dielectric film shown in different humidity conditions under the interference spectrum, used to estimate the response performance of the sensor, and provide a theoretical basis for the improvement of preparation process design and sensor films. (3) film system design of the multilayer optical film, preparation and testing: the film system design of humidity sensing film, comparing the advantages and disadvantages; the optical thin film preparation, preparation method used in this research, equipment and preparation process. Humidity sensitive thin film preparation and test out. (4) Ti O2/Si O2/Ti O2 film based on porous F-P film optical fiber humidity sensor experimental research: introduced the sensor preparation method and experimental method, the effect of different The sensor response preparation at different relative humidity conditions. The optimum test prepared under sensor humidity response, repeatability, response time, temperature of crosstalk, finally, focus on the influence of film morphology, moisture sensitivity and heat treatment on the stability of the sensor. And were displayed by the Wuhan Institute of measurement and testing technology of optical fiber humidity sensor calibration report and the actual application in Mianyang Chinese Academy of Engineering Physics Institute of optical fiber sensor for measuring and checking the results. The innovation of this paper is the method by physical vapor deposition of multilayer interference film technology and optical fiber sensing technologies, and to get the way of humidity sensor the other fiber optic humidity sensor based on sensing performance is outstanding, especially for the measurement of low humidity, has great application prospect.

【学位授予单位】：武汉理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.2;TP212

【参考文献】