多点接触微纳加工设备的力检测及控制系统的设计与实现

发布时间：2018-02-04 02:23

本文关键词： 摩擦诱导加工微纳制造纳米摩擦学摩擦力设备　出处：《西南交通大学》2015年硕士论文　论文类型：学位论文

【摘要】：纳米技术在微电子技术、生物医学、国防科技等领域崭露头角,迅速发展成为21世纪最具有广阔发展前景的新技术。纳米加工技术是纳米技术走向应用的载体。随着纳米技术的飞速发展,多种纳米加工方法应运而生。摩擦诱导加工方法作为一种低成本的方法,具有巨大发展潜力。本文以第一代摩擦诱导微米级加工设备为蓝本,对其力检测和控制系统进行设计,研制出自动化程度更高、功能更丰富的第二代加工设备。与第一代设备相比,除了可实现上一代设备基本功能外,还可以实时检测加工过程中的摩擦力信号,对介于宏观和微观之间状态的材料表面摩擦、磨损情况进行研究。第二代的设备具有加工效率更高、加工质量更好、操作更为简便等优点。本文的主要工作和结论如下：1.研制了高精度载荷和摩擦力信号采集系统。在摩擦诱导加工过程中,载荷对加工结果影响显著；此外,摩擦力能反映扫描过程中针尖与样品的摩擦状态,此二者的精确检测对获得良好的加工结果和后续研究意义重大。力信号采集机构是将力信号转换为计算机可以识别的数字信号的装置,设计采用激光位移传感器检测正应力,电阻应变片检测摩擦力。2.设计和加工了双向受力形变悬臂。悬臂结构与可靠性对力检测结果具有显著影响,为更好地研究设备加工过程中针尖与样品的实时接触状况,设计了可同时在法向和切向产生形变的组合式平行双簧片悬臂梁,该悬臂梁法向、切向形变相互独立,各不影响,保证悬臂位移真实地反映其受力大小。3.实现了载荷的自动控制。第一代设备中手动加载方式的加工效率和可控性较低,因此在第二代设备中采用软件控制的Z向位移台执行载荷进给运动,使得所有加工操作都在软件控制面板实现,提升了设备的效率和操作体验。
[Abstract]:Nanotechnology is emerging in the fields of microelectronics, biomedicine, defense science and technology. In 21th century, it has become the most promising new technology. Nanoprocessing technology is the carrier of nanotechnology application. With the rapid development of nanotechnology. As a low-cost method, friction induced processing has great development potential. This paper takes the first generation friction induced micron processing equipment as the blueprint. The force detection and control system is designed, and the second generation processing equipment with higher automation degree and richer function is developed. Compared with the first generation equipment, it can realize the basic functions of the previous generation equipment. It can also detect the signal of friction force in the process of machining in real time, and study the friction and wear of materials between macro and micro state. The second generation equipment has higher machining efficiency and better quality. The main work and conclusions of this paper are as follows: 1. A high precision signal acquisition system for load and friction is developed. In the process of friction-induced processing, the load has a significant effect on the processing results. In addition, the friction force can reflect the friction state between the tip and the sample during the scanning process. The accurate detection of these two methods is of great significance to obtain good machining results and further research. The force signal acquisition mechanism is a device to convert the force signal into a digital signal that can be recognized by the computer. The laser displacement sensor is used to detect the normal stress and the resistance strain gauge is used to detect the friction force. 2. The bidirectional deformation cantilever is designed and machined. The cantilever structure and reliability have a significant effect on the results of the force detection. In order to better study the real-time contact between the tip and the sample during the processing of the equipment, a combined parallel double-spring cantilever beam, which can produce deformation in both normal and tangential directions, is designed. The cantilever beam is normal. The tangential deformation is independent of each other and does not affect each other, which ensures that the cantilever displacement truly reflects the force magnitude. 3. The automatic control of the load is realized. The machining efficiency and controllability of the manual loading mode in the first generation equipment are low. Therefore, in the second generation equipment, the Z-direction displacement table controlled by software is used to carry out the load feed movement, which makes all processing operations realized in the software control panel, and improves the efficiency and operation experience of the equipment.
【学位授予单位】：西南交通大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1;TP273

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