退火处理对WC-DLC薄膜结构及性能的影响

发布时间：2018-04-01 16:51

  本文选题：WC-DLC薄膜　切入点：退火　出处：《中国表面工程》2017年03期

【摘要】：为研究退火处理对WC-DLC薄膜结构与性能的影响,采用磁控溅射技术在高速钢表面沉积WC-DLC薄膜,并作不同温度下的退火处理,对不同温度退火处理后的WC-DLC薄膜的结构、摩擦学性能与耐腐蚀性能进行系统表征。结果表明:WC-DLC薄膜呈现出非晶态特征,随着退火温度的上升,薄膜中sp3-C相对含量下降;当退火温度在250℃时,WC-DLC薄膜在大气环境下与去离子水环境下分别表现出最优的摩擦学性能,磨损率分别为1.25×10~(-7)mm~3/Nm与1.02×10~(-7)mm~3/Nm。同时,当退火温度低于250℃时,WC-DLC薄膜的耐腐蚀性能无明显变化,但当退火温度高于250℃时,WC-DLC薄膜的耐腐蚀性明显下降。退火处理对WC-DLC薄膜的热稳定性、摩擦学性能及耐腐蚀性能有重要影响。
[Abstract]:In order to study the effect of annealing treatment on the structure and properties of WC-DLC thin films, WC-DLC thin films were deposited on the surface of high speed steel by magnetron sputtering. The structures of WC-DLC films annealed at different temperatures were studied.The tribological properties and corrosion resistance were systematically characterized.The results show that the WC-DLC thin films exhibit amorphous characteristics, and the relative content of sp3-C in the films decreases with the increase of annealing temperature, and the optimum tribological properties of WC-DLC films under atmospheric and deionized water conditions are obtained when the annealing temperature is 250 鈩，

本文编号：1696434