不同碳含量掺杂对多弧离子镀CrCN涂层摩擦学性能的影响

发布时间：2018-04-10 06:07

  本文选题：乙炔流量　切入点：CrCN涂层　出处：《金属热处理》2016年01期

【摘要】：采用多弧离子镀技术在304不锈钢和单晶硅片上沉积Cr CN涂层,通过改变乙炔流量(20~60 sccm)来控制涂层中的碳含量,利用SEM、XRD、XPS、纳米压痕仪、划痕测试仪及摩擦磨损试验对涂层的微观结构及性能进行了对比研究,分析了不同碳元素的含量对涂层组成及性能的影响。结果表明,随着碳含量的增加,各衍射峰整体呈现出下降趋势,涂层由晶态向非晶态转变,化学成分出现明显变化;当乙炔流量为40 sccm时,硬度、弹性模量和结合力达到最高,分别为25 GPa、345 GPa及77 N。与此同时,随着乙炔流量的增加,涂层的摩擦因数及磨损率呈现出先递减后递增的趋势,在乙炔流量为40 sccm时达到最低,涂层表现出较优异的摩擦学性能。
[Abstract]:The Cr CN coating was deposited on 304 stainless steel and single crystal silicon by multi-arc ion plating. The carbon content of the coating was controlled by changing the acetylene flow rate of 2060 sccm.The microstructure and properties of the coatings were studied by scratch tester and friction and wear test. The effects of different carbon content on the composition and properties of the coatings were analyzed.The results show that the diffraction peaks decrease with the increase of carbon content, the coating changes from crystalline state to amorphous state, the chemical composition changes obviously, and the hardness, modulus of elasticity and adhesion reach the highest when acetylene flow rate is 40 sccm.The results were 25 GPA 345 GPa and 77 N, respectively.At the same time, with the increase of acetylene flow rate, the friction coefficient and wear rate of the coating decreased first and then increased, and reached the lowest when the acetylene flow rate was 40 sccm, and the coating showed excellent tribological properties.
【作者单位】： 昆明理工大学材料科学与工程学院;中国科学院宁波材料技术与工程研究所;昆明理工大学分析测试中心;
【基金】：国家自然科学基金(21363012,51374117)
【分类号】：TB306
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本文编号：1729981