银铜双原子MACE法制备多晶硅陷光结构及其性能的研究

发布时间：2018-04-12 14:27

本文选题：黑硅 + 减反射　；参考：《功能材料》2017年01期

【摘要】：采用一步银铜双原子金属辅助化学腐蚀(MACE)法,于室温下在多晶硅表面制备纳米陷光结构,研究了腐蚀时间及银铜摩尔比对多晶硅表面反射率和形貌的影响。用分光光度计测量了多晶硅表面的反射率,用扫描电镜观察了表面形貌。发现银铜双原子MACE法所形成的结构比银单原子或铜单原子MACE法所形成的结构更加平整且具有更低的表面反射率室温下经过银铜两种金属原子协同催化腐蚀后,在银铜原子摩尔比低于1/10时多晶硅表面形成了纳米多孔状与槽状结构共存的复合结构,在银铜原子摩尔比高于1/5时多晶硅表面形成密集的纳米线结构。研究结果表明,孔状与槽状的复合结构具有良好的陷光效果,当银铜原子摩尔比为1/10,腐蚀时间为180s时,多晶硅的反射率达到最低,仅为6.23%。
[Abstract]:A one-step silver copper diatomic metal assisted chemical etching (MACEE) method was used to prepare nano-trapping structure on polysilicon surface at room temperature. The effects of corrosion time and Ag / Cu molar ratio on the surface reflectivity and morphology of polysilicon were studied.The reflectivity of polysilicon surface was measured by spectrophotometer and the surface morphology was observed by scanning electron microscope.It is found that the structure of silver copper diatomic MACE method is more flat and has lower surface reflectivity than that of silver monatomic or copper monatomic MACE method.When the molar ratio of silver to copper is less than 1 / 10, the composite structure of nano-porous and grooved structure is formed on the surface of polysilicon, and the dense nanowire structure is formed on the surface of polysilicon when the molar ratio of silver to copper is higher than 1 / 5.The results show that the composite structure of pore and groove has good trapping effect. When the molar ratio of silver and copper is 1 / 10 and the corrosion time is 180s, the reflectivity of polysilicon is the lowest, which is only 6.23.
【作者单位】：南京航空航天大学材料科学与技术学院江苏省能量转换材料与技术重点实验室;南京航空航天大学纳米智能材料器件教育部重点实验室;江苏辉伦太阳能科技有限公司;
【基金】：国家自然科学基金资助项目(61176062) 江苏省前瞻性联合创新资助项目(BY2013003-08) 研究生创新基地(实验室)开放基金资助项目(KFJJ20160605)
【分类号】：TQ127.2;TB383.1

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