铜粒子辅助刻蚀单晶硅形貌控制研究

发布时间：2018-04-15 05:24

本文选题：金属辅助化学刻蚀 + 铜纳米颗粒　；参考：《昆明理工大学》2016年硕士论文

【摘要】：随着全球经济的飞速发展,化石能源日趋枯竭及其使用所产生的温室气体排放和环境恶化等问题使得开发利用可再生能源成为未来能源发展的共识。太阳能因其储量无穷、不受地域限制、清洁无污染等优点而备受关注。近年来,在世界各国的大力推动之下太阳能电池技术获得了突飞猛进的发展,然而就目前而言,较高的发电成本仍然是阻碍其大规模运用的主要原因。业界普遍认为：1)降低太阳能电池制作材料的用量及损耗,2)提高太阳能电池转换效率是有望实现低价光伏发电的重要手段。本文采用金属铜纳米颗粒辅助化学刻蚀技术,通过对实验参数进行调控,以实现在单晶硅片表面可控引入不同微纳米结构,如纳米多孔结构、金字塔结构和金字塔-纳米线二元复合结构等,利用SEM、AFM和UV-vis等对不同微纳米结构的孔隙大小、金字塔大小和反射率进行表征,分析其差异和原因,旨在进一步提高硅基底对太阳光的吸收效率。1)多孔和金字塔结构的引入研究,系统考察了不同参杂浓度硅片、不同制备参数(沉积刻蚀时间、刻蚀液配比、刻蚀时间、刻蚀温度)对多孔结构和金字塔形貌的影响。研究表明：多孔结构的孔隙率随着纳米铜颗粒的密度,刻蚀时间,刻蚀温度和氧化剂浓度的增加而增大,孔径大小范围为50nm～3μm;金字塔结构的大小随着纳米铜颗粒的密度,刻蚀时间,刻蚀温度的增大和氧化剂浓度的减小而增大,金字塔底面直径为0.1～3μm,高度为0.1～2μm。根据实验结果,提出球棍模型对不同氧化剂条件下形成的多孔结构和金字塔结构进行了解释。2)金字塔和金字塔-纳米线二元复合结构光学性能研究,考察了不同制备参数条件下获得的金字塔和金字塔-纳米线二元复合结构样品反射率特性。研究结果表明,与单晶硅片35%的反射率相比,金字塔结构和金字塔-纳米线二元复合结构样品的反射率都有明显降低,分别为15%和5%左右,这有助于进一步提高太阳能电池的转换效率。
[Abstract]:With the rapid development of the global economy, fossil energy is increasingly exhausted and the greenhouse gas emissions and environmental degradation caused by the use of fossil energy make the development and utilization of renewable energy become the consensus of energy development in the future.Solar energy has attracted much attention because of its unlimited reserves, free from geographical restrictions, clean and pollution-free and so on.In recent years, solar cell technology has been developed by leaps and bounds under the impetus of various countries in the world. However, at present, high power generation cost is still the main reason that hinders its large-scale application.It is widely believed that reducing the consumption of solar cell materials and reducing the loss of solar cells are important means to improve the conversion efficiency of solar cells and to achieve low cost photovoltaic power generation.In this paper, the metal copper nanoparticles assisted chemical etching technique is used to control the experimental parameters to realize the controllable introduction of different microstructures, such as nano-porous structures, on the surface of single crystal silicon wafers.Pyramidal structure and pyramide-nanowire binary composite structure were used to characterize the pore size, pyramid size and reflectivity of different microstructures, and to analyze their differences and reasons.In order to further improve the absorption efficiency of solar light by silicon substrate, the porous structure and pyramid structure of silicon substrate were studied. The different preparation parameters (deposition etching time, etching solution ratio, etching time) were systematically investigated.The effect of etching temperature on porous structure and pyramid morphology.The results show that the porosity of porous structure increases with the increase of the density of copper nanoparticles, etching time, etching temperature and oxidant concentration, and the pore size is in the range of 50nm~3 渭 m, and the size of pyramid structure increases with the density of copper nanoparticles.The etching time, the etching temperature and the concentration of oxidant increased. The diameter of the pyramid was 0.1 渭 m and the height was 0.1 渭 m.Based on the experimental results, the spherical stick model was proposed to explain the porous and pyramid structures formed under different oxidant conditions. 2) the optical properties of pyramid and pyramide-nanowire binary composite structures were studied.The reflectance characteristics of pyramidal and pyramidal-nanowire binary composite structures obtained under different preparation parameters were investigated.The results show that the reflectivity of pyramidal structure and pyramidal-nanowire composite structure is about 15% and 5%, respectively, compared with the 35% reflectivity of single crystal silicon wafer.This helps to further improve the conversion efficiency of solar cells.
【学位授予单位】：昆明理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TM914.4;TB383.1

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