化学浴沉积ZnO:Al薄膜及其在CZTS电池中的应用

发布时间：2018-04-17 22:42

  本文选题：化学浴沉积 + 铝掺杂氧化锌　； 参考：《哈尔滨工业大学》2017年硕士论文

【摘要】：随着计算机、触摸屏、太阳能电池、液晶显示等领域的不断发展,一种新的半导体材料—透明导电薄膜应运而生。在太阳能电池中,作为电极的透明导电膜对提高电池的光电转换效率具有极大的意义。与氧化铟锡薄膜相比,铝掺杂氧化锌薄膜具有原料无毒、来源广泛、在氢等离子体中更加稳定等优势,运用溶液法来制备薄膜,成本低廉、操作简单且环境友好,极具研究价值。基于上面介绍的背景,本文采用化学浴沉积的方法制备铝掺杂氧化锌透明导电薄膜。通过在衬底上制备一层种子层,然后在一定的温度下水浴处理的方式来获得结构致密的氧化锌薄膜。研究发现,种子层的制备、水溶液的沉积工艺参数对氧化锌薄膜的最终形貌有重要的影响,种子层热处理温度、溶液浓度和旋涂次数会影响种子层的厚度、均匀性和黏附性。沉积温度会影响氧化锌纳米棒的生长速度、结晶取向和晶粒尺寸,水溶液中氧化锌的浓度对纳米棒的结构、密度和生长速度影响明显。柠檬酸铵可以促进氧化锌纳米棒的横向生长,向溶液中添加适量浓度的柠檬酸铵可以得到结晶取向高度一致、结构致密、晶粒尺寸均匀的氧化锌薄膜,直接影响薄膜的电阻率。采用溶胶-凝胶法制备种子层在溶液浓度为0.5 mmol/L、热处理温度为250℃、旋涂两次的条件下,获得的种子层最为均匀平整。当沉积温度为80℃、氧化锌浓度为38 mmol/L、柠檬酸铵浓度为2 mmol/L时,薄膜的结晶形貌最好,电阻率最低。本文分别采用铝片和九水硝酸铝溶液来对氧化锌薄膜进行掺杂,发现在采用铝片作为铝源的情况下,溶液中铝片的面积、溶液的p H值和薄膜的生长时间对薄膜的电学性能具有重要的影响。而在采用九水硝酸铝溶液进行掺杂的过程中,溶液的浓度和生长时间则是最重要的影响因素。采用紫外照射的方式可以使薄膜的电阻率大幅度降低,经过紫外处理的铝掺杂氧化锌薄膜的电阻率最低可以达到10-2数量级。最后将该薄膜沉积在CZTS薄膜太阳能电池的表面,并对太阳能电池的光电转化效率、外量子效率进行测量。电池的光电转化效率(η)可以达到5.47%,电池的开路电压(Voc)为625 m V,短路电流(Jsc)等于16.43 m A/cm2,填充因子(FF)为53.4%。说明采用化学浴沉积法,通过铝片进行掺杂的方式可以制备出满足CZTS太阳能电池使用要求的AZO薄膜。
[Abstract]:With the development of computer, touch screen, solar cell, liquid crystal display and so on, a new kind of semiconductor material-transparent conductive film emerges as the times require.In solar cells, the transparent conductive film as an electrode is of great significance to improve the photoelectric conversion efficiency of the cell.Compared with indium tin oxide thin film, aluminum doped zinc oxide film has the advantages of non-toxic raw material, wide source, more stable in hydrogen plasma and so on. The preparation of thin film by solution method is cheap, easy to operate and environmentally friendly.It is of great research value.Based on the background above, aluminum doped zinc oxide thin films were prepared by chemical bath deposition.A dense ZnO thin film was obtained by preparing a seed layer on the substrate and then treating it in a water bath at a certain temperature.It is found that the preparation of seed layer and the deposition process parameters of aqueous solution have an important influence on the final morphology of ZnO film. The thickness, uniformity and adhesion of ZnO film are affected by the heat treatment temperature, solution concentration and spin-coating times.The growth rate, crystal orientation and grain size of ZnO nanorods are affected by deposition temperature, and the structure, density and growth rate of nanorods are influenced by the concentration of ZnO in aqueous solution.Ammonium citrate can promote the transverse growth of zinc oxide nanorods. Adding appropriate concentration of ammonium citrate to the solution can result in ZnO thin films with uniform crystal orientation, dense structure and uniform grain size, which directly affect the resistivity of the films.When the solution concentration is 0.5 mmol / L, the heat treatment temperature is 250 鈩，

本文编号：1765653