感光鼓沉积类金刚石碳膜的制备工艺研究

发布时间：2018-04-27 14:30

本文选题：类金刚石碳膜 + 感光鼓　；参考：《山东大学》2015年硕士论文

【摘要】：本实验利用自制的磁控弧光射频等离子体增强化学气相沉积(RF magnetron PECVD)设备,在生物玻璃片上制备类金刚石碳(DLC)膜,利用探针轮廓仪、原子力显微镜(AFM)、拉曼光谱仪(Raman spectrum)、X射线光电子能谱仪(XPS)、紫外-可见分光光度计(UV-Vis)及摩擦磨损仪等表征DLC膜的厚度、结构、成分、表面形貌、粗糙度、透过率及摩擦系数,探究不同工艺参数对DLC膜结构和性能的影响,获得综合性能优异的薄膜。实验表明,以丁烷为反应气体,氩气为载流气体,利用RF-PECVD法在生物玻璃片上成功地制备了DLC膜,其中工艺参数为基础真空度9.8× 10-3Pa,射频功率600W,C4H10/Ar流量比1.5/25,沉积时间2min时获得的薄膜厚度适中、表面光滑致密、粗糙度小、sp3比例大、透过率高、摩擦系数低,DLC膜综合性能优异。在感光鼓外表面裹一层PET,以圆柱状PET为基底材料,采用优化的工艺参数,以旋转镀膜的方式,在不同沉积时间下制备DLC膜,获得PET上旋转镀膜的适宜时间。实验结果表明PET上涂覆的DLC膜略微发黄,可能是薄膜不纯导致的；且其膜基结合力比生物玻璃片上沉积的薄膜的膜基结合力好。旋转速度为16s/转时,PET上沉积DLC膜的时间控制在3-6min为宜。沿用PET上旋转镀膜的方法,在OPC感光鼓上采用一半镀膜一半不镀膜的方法在感光鼓非齿轮侧和齿轮侧沉积DLC膜,并用自制的摩擦仪测试感光鼓的耐磨性。摩擦结果表明：第一,感光鼓最易磨损的地方为未镀膜部分的换向处；第二,无论感光鼓哪侧镀膜(非齿轮侧或齿轮侧),不同沉积时间下,沉积了DLC膜的感光鼓的摩擦寿命均可提高至2-3倍,表明DLC膜的减摩效果显著；第三,样品8-3 OPC感光鼓,即沉积时间为6min时,沉积了DLC膜后感光鼓的摩擦寿命提高倍数较为稳定,均为3倍左右。采用沉积时间为6min的镀膜工艺,在感光鼓非齿轮侧和齿轮侧沉积DLC膜,并将其装入激光打印机中打印,测试其使用寿命。感光鼓在打印机中的测试结果显示：第一,沉积了DLC膜的感光鼓打印页面清晰、无缺陷,与全新未处理的感光鼓打印效果完全相同,表明感光鼓上沉积的DLC膜对激光打印机的打印效果完全没有影响。第二,感光鼓打印了3000页后,页面文字变浅,表明感光鼓表面光导材料磨损,感光性能变差,文字变浅。第三,沉积了DLC膜后的感光鼓使用寿命均提高至2倍以上,表明DLC膜在感光鼓上的应用成功地延长了感光鼓的使用寿命。
[Abstract]:In this experiment, the diamond-like carbon carbon (DLC) film was prepared on a biofilm by using a self-made RF plasma enhanced chemical vapor deposition (magnetron) device, and a probe profilometer was used. The thickness, structure, composition, surface morphology, roughness, transmittance and friction coefficient of DLC films are characterized by atomic force microscope, Raman spectrometer, X-ray photoelectron spectrometer, UV-Visometer and friction and wear apparatus. The effects of different process parameters on the structure and properties of DLC films were investigated and the films with excellent comprehensive properties were obtained. The experimental results showed that DLC films were successfully prepared on biological glass by RF-PECVD method using butane as reaction gas and argon as carrier gas. The technological parameters are basic vacuum 9.8 脳 10 ~ (-3) Pa, RF power 600WN C _ 4H _ (10) / ar flow ratio 1.5 / 25, the film thickness is moderate, the surface is smooth and compact, the roughness is small and the proportion of sp _ 3 is large, the permeability is high, and the friction coefficient is low when the deposition time is 2min. On the outer surface of the photosensitive drum, the DLC film was prepared by using cylindrical PET as substrate material. The optimum time of rotating coating on PET was obtained by using the optimized process parameters and the method of rotating deposition. The experimental results show that the DLC film coated on PET is slightly yellowish, which may be due to the impurity of the film, and the substrate adhesion of the film is better than that of the film deposited on the biofilm. When the rotation rate is 16s/, the time of deposition of DLC film on 16s/ is controlled by 3-6min. Using the method of rotating coating on PET, the method of half coating and half no coating on OPC photosensitive drum was used to deposit DLC film on the non-gear side and gear side of the photosensitive drum, and the wear resistance of the photosensitive drum was tested by a self-made friction instrument. The friction results show that: first, the most easily worn part of the photosensitive drum is the reverse of the uncoated part; second, no matter which side of the photosensitive drum is coated (non-gear side or gear side, different deposition time), The friction life of photosensitive drum deposited by DLC film can be increased to 2-3 times, which indicates that the friction reducing effect of DLC film is remarkable. Thirdly, when the sample 8-3 OPC photosensitive drum, that is, when the deposition time is 6min, the friction life of photosensitive drum deposited with DLC film is more stable. All of them were about 3 times. The DLC film was deposited on the non-gear side and the gear side of the photosensitive drum by the process of deposition time 6min. The film was printed in a laser printer and its service life was tested. The test results of the photoreceptor drum in the printer show that: first, the photo-sensitive drum printing page deposited with DLC film is clear and without defect, which is exactly the same as the new unprocessed photo-sensitive drum printing effect. The results show that the DLC film deposited on the photosensitive drum has no effect on the printing effect of laser printer. Secondly, after 3000 pages of photo-sensitive drum printing, the text of the page becomes shallow, indicating that the photoconductive material on the surface of the photosensitive drum is worn out, the photosensitivity becomes poor, and the text becomes shallow. Thirdly, the service life of the photoreceptor drum deposited by DLC film is increased to more than 2 times, which indicates that the application of DLC film on the photosensitive drum has successfully prolonged the service life of the photosensitive drum.
【学位授予单位】：山东大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ163;TB383.2

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