基于超薄金属薄膜的超宽频太赫兹分束器

发布时间：2018-04-27 18:45

本文选题：薄膜 + 太赫兹　；参考：《光学学报》2017年11期

【摘要】：提出了一种以聚酯薄膜作为支撑的超薄金属薄膜太赫兹分束器结构,建立了该结构的基于传输矩阵理论的分束模型,分析了不同厚度金属Cr膜和聚酯薄膜对超宽频段太赫兹分束器的反射率、透射率和分束比的影响.理论结果表明,太赫兹分束器的分束性能受金属Cr膜厚度的影响较大,而受聚酯薄膜厚度的影响较小.在此基础上,制备了不同厚度金属Cr膜的太赫兹分束器件,并进行了分束实验,获得了与理论分析一致的实验结果,确定了1∶1分束比下的器件结构参数.
[Abstract]:A terahertz beam splitter structure supported by polyester film is proposed, and a beam splitting model based on transfer matrix theory is established. The effects of metal Cr films and polyester films on the reflectivity, transmittance and beam splitting ratio of terahertz beam splitter in ultra-wide band were analyzed. The theoretical results show that the beam splitting performance of terahertz beam splitter is greatly affected by the thickness of metallic Cr film, but less by the thickness of polyester film. On this basis, terahertz beam splitting devices with different thickness metal Cr films have been fabricated, and beam splitting experiments have been carried out. The experimental results are in agreement with the theoretical analysis, and the structure parameters at 1:1 beam splitting ratio have been determined.
【作者单位】：长春理工大学高功率半导体激光国家重点实验室;中国科学院重庆绿色智能技术研究院跨尺度制造技术重庆市重点实验室;
【基金】：国家自然科学基金(61504147,61605206,11604332) 中国科学院西部之光资助课题
【分类号】：O441;TB383.2

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