基于散粒磨料的超光滑抛光材料去除机理与试验研究

发布时间：2018-05-23 12:25

本文选题：超光滑抛光 + 散粒磨料　；参考：《中国科学院光电技术研究所》2017年博士论文

【摘要】：随着现代科学的进步和工程实践技术的发展,尤其是微电子学领域、光学领域及其相关技术的快速进展,超光滑表面的需求量与日俱增,同时对其表面质量指标的要求也越来越高。基于散粒磨料的超光滑抛光方法是目前制造超光滑表面的主流方法,可是其技术的研究仍然处于半经验阶段,受操作者经验的影响极大,因此建立合适的材料去除率模型将有利于基于散粒磨料的超光滑抛光技术从半经验走向精确控制的发展。但是目前提出的众多材料去除机理及模型中,以Preston为代表的宏观机理模型注重对试验参数的控制,未能仔细考虑磨料颗粒在抛光过程中的作用;而以Jianfeng Luo模型、分子动力学仿真、原子力显微镜划痕实验为代表的微观机理模型虽然认真考虑并分析了磨料颗粒的材料去除作用,但是其外部边界条件与实际抛光中的试验参数不能很好的衔接,因此无法很好地在宏观抛光试验中直接验证。因此本文在前人提出的材料去除机理的基础上,提出了中观尺度的概念,并在这一尺度上作了理论模型构建和试验研究,主要在以下几个方面取得了突破进展:(1)充分调研了超光滑表面抛光过程中的材料去除机理,在此基础上,以研究对象及模型参数的区别,提出了针对材料抛光去除机理的宏观尺度、微观尺度和中观尺度的概念、尺度范围及研究对象。分析了在中观尺度上构建材料抛光去除模型及开展相关试验的意义。(2)在中观尺度宏观层面上,总结了前人的宏观磨粒磨损抛光机理,提出了相应的材料去除机理模型;在中观尺度微观层面上,分别对储液抛光模和非储液抛光模构建了磨粒磨损的材料去除机理模型。比较了中观尺度下这两个层面的材料去除机理模型,给出了在中观尺度下影响表面质量的几个重要因素,如抛光模/工件硬度、压力、速度等,并分析了中观尺度下宏观层面参量和微观层面参量之间的关系。(3)利用微摩擦仪系统对钢质抛光面、聚氨酯抛光面、沥青抛光面三种材料的抛光面在BK7玻璃表面进行了往复直线运动的摩擦磨损试验,试验结果表面,钢质抛光面、聚氨酯表面和沥青表面对玻璃表面的去除机理是不同的。(4)开展了基于微摩擦仪的聚氨酯抛光面在不同压强与速度下的材料去除试验。试验结果表明在中观尺度下,材料去除率与压力成平方关系,即MRR∝F~2；与速度成正比关系,即MRR∝V。(5)借助正交试验方法,利用浴法抛光对影响抛光结果的因素作了五因素三水平试验,并同时对材料去除率和表面粗糙度分析。使用试验得到的最优化参数得到了粗糙度为0.2076nm的超光滑平面。提出了正交试验中空间频率的极差分析方法,并将五因素三水平正交试验结果分为3个频段进行了分析,得出了每个频段影响最大或最小的因素,并使用相关抛光材料去除机理进行了解释。
[Abstract]:With the progress of modern science and the development of engineering practice technology, especially in the field of microelectronics, the field of Optics and its related technology, the demand for super smooth surface is increasing, and the requirements for its surface quality are becoming higher and higher. The super smooth polishing method based on granular abrasive is the super smooth surface at present. The mainstream method, however, is still in the semi empirical stage, which is greatly influenced by the experience of the operator. Therefore, the establishment of a suitable material removal rate model will be beneficial to the development of ultra smooth polishing technology based on granular abrasive materials from semi experience to precise control. The macro mechanism model, represented by Preston, pays more attention to the control of experimental parameters and fails to consider the effect of abrasive particles in the polishing process. The micro mechanism model, represented by the Jianfeng Luo model, molecular dynamics simulation, and the scratch test of atomic force microscope, seriously considers and analyzes the material removal effect of abrasive particles, But the external boundary conditions are not well connected with the experimental parameters in the actual polishing, so it can not be well verified in the macro polishing test. Therefore, on the basis of the material removal mechanism proposed by the predecessors, the concept of meso scale is put forward, and the theoretical model construction and experimental research are made on this scale. The following progress has been made in the following aspects: (1) the material removal mechanism in the process of super smooth surface polishing is fully investigated. On this basis, the macroscopic scale, the concept of micro scale and meso scale, the scale range and the research object are put forward in view of the difference between the object and the model parameters. The significance of material polishing removal model and related experiments is constructed on the meso scale. (2) at the meso scale macro level, the macroscopic abrasive wear polishing mechanism of predecessors is summarized, and the corresponding material removal mechanism model is put forward. At the meso scale micro level, the abrasive polishing mould and the non liquid storage polishing die are constructed respectively. The material removal mechanism model of damaged material is compared. The material removal mechanism model of these two layers at meso scale is compared, and several important factors affecting the surface quality under the meso scale are given, such as the hardness, pressure and velocity of the polishing die / workpiece, and the relationship between the macroscopic layer parameters and the micro level parameters under the meso scale is analyzed. (3) the utilization of the macroscopic layer parameters and the micro level parameters in the meso scale. The friction and wear tests on the surface of the BK7 glass on the surface of the BK7 glass were tested on the surface of the polishing surface of the steel polished surface, the polyurethane polishing surface and the asphalt polishing surface. The surface of the test results, the polishing surface of the steel, the surface of the polyurethane surface and the asphalt surface were different. (4) the micro friction was carried out based on the micro friction. The material removal test of the polyurethane polishing surface at different pressure and speed has been tested. The results show that the material removal rate and the pressure are square relation, that is, MRR F~2, and the relationship with the velocity is proportional to the velocity, that is, the MRR V. (5), with the aid of the orthogonal test, makes use of the bath polishing for the factors affecting the polishing results by five factors. At the same time, the material removal rate and the surface roughness are analyzed. The super smooth plane with the roughness of 0.2076nm is obtained by the optimum parameters obtained by the test. The extreme difference analysis method for the spatial frequency in the orthogonal test is proposed. The results of the five factor three horizontal orthogonal test are divided into 3 frequency bands and each frequency band is obtained. The factors that affect the maximum or minimum are explained by using the mechanism of polishing material removal.
【学位授予单位】：中国科学院光电技术研究所
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TB306

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