Cu含量对NbCN-Cu复合膜微结构、力学性能及摩擦磨损性能的影响

发布时间：2018-06-24 08:42

  本文选题：射频磁控溅射 + NbCN-Cu复合膜　； 参考：《真空科学与技术学报》2016年04期

【摘要】：利用高真空磁控溅射仪制备了不同Cu含量的NbCN-Cu复合膜。采用X射线光电子能谱、X射线衍射仪、纳米压痕仪、扫描电镜、三维形貌仪和摩擦磨损仪对薄膜的微观结构、力学性能以及摩擦磨损性能进行了分析。结果表明,NbCN-Cu复合膜为面心立方δ-NbN、六方δ'-NbN和单质Cu相三相共存结构。随Cu含量增加,NbCN-Cu复合膜的硬度值先缓慢上升再迅速下降,Cu含量为2.27%时,获得最大硬度,为31.43 GPa。室温下,随Cu含量的增加,NbCN-Cu复合膜的摩擦系数先缓慢上升再快速上升,磨损率先缓慢下降再快速上升。当温度从室温温度上升到500℃,不同Cu含量的NbCN—Cu的摩擦系数均先升高后降低,磨损率逐渐上升,温度一定,Cu含量越高,磨损率越高;300~500℃内,温度一定,Cu含量越高,NbCN-Cu复合膜的摩擦系数越低。
[Abstract]:NbCN-Cu composite films with different Cu contents were prepared by high vacuum magnetron sputtering. The microstructure, mechanical properties and friction and wear properties of the films were analyzed by X-ray photoelectron spectroscopy (XPS) X-ray diffraction, nano-indentation, scanning electron microscopy, three-dimensional topography and friction and wear analysis. The results show that the NbCN-Cu composite film consists of a face-centered cubic 未 -NbN, a hexagonal 未 -NbN and a single Cu phase. With the increase of Cu content, the hardness of NbCN-Cu composite film increases slowly and then decreases rapidly. When the Cu content is 2.27, the maximum hardness of NbCN-Cu composite film is 31.43 GPa. At room temperature, the friction coefficient of NbCN-Cu composite films increases slowly first and then rapidly with the increase of Cu content. When the temperature increases from room temperature to 500 鈩，

本文编号：2060870