热压印成型体缺陷与模板结构耐久性研究

发布时间：2018-06-30 05:21

本文选题：热压印 + 数值模拟　；参考：《山东科技大学》2017年硕士论文

【摘要】：纳米压印技术是常用的一种微纳米结构制造技术,因其具有低成本、高分辨率、操作简单等优点而被看作是最具有工业化应用前景的微纳米结构制造方法之一。随着纳米压印技术应用领域的不断扩展,对纳米压印技术的基础性研究提出了更大的挑战。基于国内外最新研究进展,本学位论文以常用的热压印技术为研究对象,围绕压印工艺与脱模工艺中出现的缺陷问题开展研究工作。论文主要研究内容与结论如下:(1)为了探究空腔填充不完全、模板耐久性差等问题,采用数值模拟的方法研究了聚合物在不同大小的压印压力下填充到三种不同形状空腔的过程。结果表明不同的压印压力下,不同侧壁形状空腔的填充及模板应力的分布都呈现出不同的特点。针对空腔下部尖锐角对聚合物填充阻力的影响以及模板上的应力集中现象,提出将三种空腔模板下部尖锐角替换成倒圆角。结果表明倒圆角的出现及圆角半径的增加对空腔填充率及模板耐久性有较好的优化行为。(2)为了减少模板与压印成型聚合物接触分离过程中出现的缺陷,对脱模机理进行研究。基于界面力学的接触理论提出了模板和聚合物之间作用力的理论模型;采用有限元仿真技术模拟模板和聚合物的接触分离过程;根据断裂力学能量平衡理论,通过脱模力和脱模位移之间的关系分析脱模规律和机理。(3)为了研究模板与压印成型聚合物的接触状态对聚合物结构变形的影响,根据模板和聚合物接触状态的差异,将脱模模型划分成三种接触类型;结合三种接触类型的脱模力与脱模位移关系,分别对聚合物凸起不同位置的颈缩变形进行分析。结果显示完全接触类型的分辨率和缺陷率都优于另外两种接触类型。最后,研究了不同效用抗粘层对聚合物结构变形的影响。根据不同效用抗粘层状态下脱模力和脱模位移关系以及不同脱模阶段聚合物的位移云图,对聚合物变形的发展进行对比及分析。结果显示黏附力的增长极易导致顶部横向接触未分离前压印成型聚合物结构的拉断。
[Abstract]:Nano-imprint technology is one of the most widely used fabrication techniques for microstructures. Because of its advantages of low cost, high resolution and simple operation, it is regarded as one of the most promising manufacturing methods for microstructures. With the expansion of the application field of nano imprint technology, the basic research of nano imprint technology is facing more challenges. Based on the latest research progress at home and abroad, this dissertation focuses on the common hot stamping technology, focusing on the defects in the imprint process and the demoulding process. The main research contents and conclusions are as follows: (1) in order to explore the problems of incomplete cavity filling and poor formwork durability, the process of polymer filling into three different shape cavities under different sizes of imprint pressure was studied by numerical simulation. The results show that the filling of cavity with different side wall shape and the distribution of formwork stress show different characteristics under different embossing pressure. In view of the effect of the lower part of cavity on the resistance of polymer filling and the stress concentration phenomenon on the template, three different types of cavity template are replaced by the obverse circle angle. The results show that the appearance of the inverted corner and the increase of the radius of the corner have a good performance on the cavity filling rate and the durability of the template. (2) in order to reduce the defects in the process of contact separation between the template and the imprinted polymer, the mechanism of demoulding is studied. Based on the contact theory of interfacial mechanics, the theoretical model of the force between template and polymer is proposed, the contact separation process between template and polymer is simulated by finite element simulation technology, and the energy balance theory of fracture mechanics is used. In order to study the influence of the contact state between the template and the imprinted polymer on the deformation of the polymer structure, according to the difference of the contact state between the template and the polymer, the relationship between the demoulding force and the demoulding displacement is analyzed. The demoulding model is divided into three contact types, and the necking deformation of polymer protrusions at different positions is analyzed by combining the relationship between the demoulding force and the demoulding displacement of the three contact types. The results show that the resolution and defect rate of the complete contact type are superior to those of the other two contact types. Finally, the effect of different anti-adhesive layers on the deformation of polymer structures was studied. The development of polymer deformation was compared and analyzed according to the relationship between demoulding force and demoulding displacement under different effective visco-resistant layers and the displacement cloud diagram of polymer in different demoulding stages. The results show that the increase of adhesion force can easily lead to the tensile fracture of the polymer structure formed by imprint before the top transverse contact is not separated.
【学位授予单位】：山东科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.1

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