提拉速度对溶胶-凝胶法制备氧化锆薄膜均匀性的影响
发布时间：2018-07-18 13:38
【摘要】：研究了3种不同提拉速度对溶胶-凝胶提拉法制备氧化锆薄膜均匀性的影响。以无机盐氧氯化锆为锆源,制备出澄清透明的溶胶;采用0.4、0.7和1.0 mm/s的提拉速度分别在二氧化硅基底上制备出氧化锆薄膜;经干燥、热处理后运用WYKO表面分析仪对薄膜表面形貌进行表征。结果表明:提拉速度对薄膜表面粗糙度具有重要作用,1.0 mm/s的提拉速度下制备的氧化锆薄膜表面粗糙度较小。
[Abstract]:The effects of three different Czochralski speeds on the homogeneity of zirconia thin films prepared by sol-gel Czochralski method were studied. Using inorganic salt zirconium oxychloride as zirconium source, a clear and transparent sol was prepared, and zirconia thin films were prepared on silica substrates at the Czochralski speeds of 0.4 and 1.0 mm/s, respectively. The surface morphology of the films was characterized by WYKO surface analyzer after heat treatment. The results show that the surface roughness of Zirconia films prepared at the Czochralski speed of 1. 0 mm/s plays an important role in the surface roughness of the films.
【作者单位】： 南昌大学机电工程学院;
【基金】：国家自然科学基金资助项目(51165031)
【分类号】：TQ134.12;TB383.2
本文编号：2132069
[Abstract]:The effects of three different Czochralski speeds on the homogeneity of zirconia thin films prepared by sol-gel Czochralski method were studied. Using inorganic salt zirconium oxychloride as zirconium source, a clear and transparent sol was prepared, and zirconia thin films were prepared on silica substrates at the Czochralski speeds of 0.4 and 1.0 mm/s, respectively. The surface morphology of the films was characterized by WYKO surface analyzer after heat treatment. The results show that the surface roughness of Zirconia films prepared at the Czochralski speed of 1. 0 mm/s plays an important role in the surface roughness of the films.
【作者单位】： 南昌大学机电工程学院;
【基金】：国家自然科学基金资助项目(51165031)
【分类号】：TQ134.12;TB383.2
【相似文献】
相关期刊论文 前1条
1 李海滨,梁开明,顾守仁;溶胶-凝胶法制备定向排列的纳米结构二氧化锆薄膜[J];清华大学学报(自然科学版);2001年Z1期
，本文编号：2132069
本文链接：https://www.wllwen.com/kejilunwen/cailiaohuaxuelunwen/2132069.html
