钛基底纳米金刚石场发射阴极的氢处理工艺研究（英文）

发布时间：2018-09-11 14:05

【摘要】：利用电泳沉积法制备了钛基底纳米金刚石的场发射阴极涂层,热处理后对其进行了氢等离子体工艺处理,然后对样品进行微观表征与场发射特性以及发光效果的测试。研究表明,H~+的吸附作用和H~+的刻蚀作用共同影响着金刚石涂层表面的形貌,氢处理作用不足则达不到效果,过强则会导致对金刚石涂层刻蚀过度,导致涂层的场发射性能以及发光效果变差,适当的氢处理有助于提高场发射性能和发光效果,最后探讨了钛基底纳米金刚石涂层氢处理的场发射机理,解释了发光效果差异的成因。
[Abstract]:Field emission cathodic coatings of nanocrystalline diamond on titanium substrate were prepared by electrophoretic deposition. The samples were treated by hydrogen plasma after heat treatment. The results show that the adsorption of H ~ and the etching of H ~ both affect the morphology of diamond coating surface, and the insufficient hydrogen treatment can not achieve the effect, too strong will lead to excessive etching of diamond coating. The field emission property and luminescence effect of the coating become worse. Proper hydrogen treatment is helpful to improve the field emission performance and luminescence effect. Finally, the field emission mechanism of hydrogen treatment on titanium substrate nanocrystalline diamond coating is discussed. The cause of the difference in luminous effect is explained.
【作者单位】：延安大学;
【基金】：National Natural Science Foundation of China(61664008) Guide Project of Yan’an University(YD 2016-02) The 2016 Local University National Training Project of Innovation and Entrepreneurship for Undergraduates(1559,1569) The Special Research Funds for Discipline Construction of High Level University Construction(2015SXTS02) The 2016 Innovation Training Project of Yan'an University(D2016109)
【分类号】：TB306

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