高介电纳米晶的合成及其与聚酰亚胺薄膜杂化的研究

发布时间：2018-11-07 20:42

【摘要】：高性能的聚酰亚胺(PI)薄膜以及涂层材料由于具有较强的机械强度、优异的耐化学性、良好的稳定性等特征而广泛应用于微电子行业。然而随着科技的不断发展,传统的聚酰亚胺薄膜已经不能满足高科技产品对薄膜的性能的要求,研究人员通过优化制膜工艺和对薄膜进行纳米改性两个途径来提高薄膜的性能。然而前者反应周期长,投资巨大,对设备要求高,而后者成本低、见效快,目前已经成为制备性能优异的聚酰亚胺薄膜的主要途径。本文采用两相法成功的制备了油酸(OA)包覆的二氧化锆(ZrO2)、钛酸钡(BaTiO3)、以及水热法制备了氢氧化镧(La(OH)3)纳米晶,并对ZrO2内米晶和BaTiO3纳米晶进行了改性,使之与聚酰亚胺能很好的混合,最后制备了PI/ZrO2、PI/BaTiO3、 PI/La(OH)3杂化薄膜。通过透射电子显微镜(TEM)、X射线衍射仪(XRD)、台阶仪、扫描电子显微镜(SEM)、精密电容电感电阻测试仪(LCR)、傅里叶红外光谱仪(FTIR)等对纳米粒子及聚酰亚胺杂化薄膜进行了测试和表征。并且对所得结果进行了分析研究。实验结果表明：在我们制备的杂化薄膜中,无机纳米粒子以颗粒状均匀的分布在聚酰亚胺基体中。我们合成了介电常数为6.1的PI/ZrO2杂化薄膜,介电常数为44的PI/BaTiO3杂化薄膜和介电常数为4.6的PI/La(OH)3杂化薄膜。杂化膜的介电常数远远高于普通聚酰亚胺薄膜。
[Abstract]:High performance polyimide (PI) films and coatings are widely used in the microelectronics industry due to their strong mechanical strength, excellent chemical resistance and good stability. However, with the development of science and technology, the traditional polyimide films can not meet the performance requirements of high-tech products. Researchers improve the performance of the films by optimizing the process of film preparation and nano-modification of films. However, the former has the advantages of long reaction period, huge investment and high demand for equipment, while the latter has become the main way to prepare excellent polyimide films with low cost and fast efficiency. In this paper, zirconium dioxide (ZrO2), barium titanate (BaTiO3) coated with oleic acid (OA) and lanthanum hydroxide (La (OH) _ 3) nanocrystals were successfully prepared by two-phase method, and the micrite and BaTiO3 nanocrystals in ZrO2 were modified. PI/ZrO2,PI/BaTiO3, PI/La (OH) _ 3 hybrid film was prepared by mixing it well with polyimide. Transmission electron microscope (TEM) (TEM), X ray diffractometer (XRD),) and scanning electron microscope (SEM),) (SEM), precision capacitance inductance resistance tester (LCR),) were used. The nanoparticles and polyimide hybrid films were measured and characterized by Fourier transform infrared spectroscopy (FTIR). The results are analyzed and studied. The experimental results show that the inorganic nanoparticles are uniformly distributed in the polyimide matrix in the hybrid films prepared by our method. We synthesized PI/ZrO2 hybrid films with dielectric constant 6.1, PI/BaTiO3 hybrid films with dielectric constant 44 and PI/La (OH) 3 hybrid films with dielectric constant 4.6. The dielectric constant of hybrid films is much higher than that of ordinary polyimide films.
【学位授予单位】：长春工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.2

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