氧化钒基薄膜的磁控溅射制备和光学性能优化
发布时间：2018-11-27 21:27
【摘要】：节能环保等功能建筑材料已成为全球性问题。据统计,采暖、制冷和采光所使用的能源所占建筑物总能耗的份额,目前在中国约达30%,而在英国等欧洲地区则高达40%以上。节能镀膜玻璃是通过制备适当的膜系来控制和利用太阳光热辐射以实现建筑节能。目前市场上的主要节能玻璃为低辐射玻璃,但是这种节能玻璃具有使用区域有限且不能对光的入射智能调控的缺点,氧化钒智能窗则可以克服这些局限性,是更理想的节能建筑窗材料。针对热致色变VO2薄膜的可见光透过率低、相变温度偏高等问题,本文采用制备超薄薄膜复合低辐射膜层的方式来解决上述问题。在本文中,我们采用直流磁控溅射和射频磁控溅射相结合的方式来制备氧化钒薄膜、掺杂氧化钒薄膜以及低辐射-氧化钒复合膜系的玻璃。在这里我们的思路是通过对薄膜的厚度和孔隙率等条件的优化,使薄膜同时具有高透过和降低的相变温度等特点。针对超薄膜层的紫外辐射和红外辐射较高的缺点,我们利用低辐射膜层进行复合以降低薄膜的辐射率。研究过程中我们利用了XRD、SEM、变温透过等不同的测试手段对所制备的薄膜的光学透过、微观结构等不同的性能进行了测试与表征,得出如下结论:1.不同溅射时间和退火工艺参数的控制对薄膜的整体性能有着至关重要的影响。通过工艺参数的优化,我们成功制备出了具有良好可见透过和良好红外调控能力的氧化钒薄膜,优化后的工艺为溅射时间为1.5 min、退火温度450℃、退火真空度100 Pa、升温速率5℃/min、保温时间0.5 h,该薄膜可见透过达到了到70%以上,同时高低温相2000 nm处透过率差值达到44%,2.通过W元素的引入,薄膜的相变温度得到明显降低,其中掺杂0.5%的薄膜的相变温度降低至44℃。3.针对薄膜厚度降低产生的红外辐射率较高和紫外辐射率提高的问题,我们选择用低辐射玻璃进行复合以降低薄膜的整体辐射率,并研究了不同的复合结构对薄膜的红外调制能力和可见透过等性能的影响,以期找出性能最优的复合方式。通过测试发现发现第一种复合方式虽然能有效降低薄膜整体的辐射率,但薄膜后的红外调控能力以及可见透过都有较大的降低。采用氧化钒薄膜/低辐射薄膜/衬底的复合形式,发现这种复合方式中低辐射膜层能够对薄膜中的晶粒起到诱导生长的作用,同时能够有效的降低薄膜的红外辐射和紫外辐射的透过率,复合后整体性能优于第一种复合方式,但第二种复合方式会对氧化钒膜层的可见透过和红外调制能力产生一定的影响。低辐射薄膜/氧化钒薄膜/衬底的结构能够在有效降低薄膜的紫外辐射和红外透过率同时对薄膜的红外调制能力、可见透过等性能影响较小。
[Abstract]:Energy conservation and environmental protection and other functional building materials have become a global problem. According to statistics, the energy used for heating, cooling and lighting accounts for about 30 percent of the total building energy consumption in China, compared with more than 40 percent in Europe such as the United Kingdom. Energy-saving coating glass is to control and utilize solar heat radiation to realize building energy saving by making appropriate film system. At present, the main energy saving glass in the market is low radiation glass, but this kind of energy saving glass has the shortcoming of limited use area and can not be adjusted intelligently to light, and vanadium oxide smart window can overcome these limitations. Is a more ideal energy-efficient building window materials. In order to solve the problems of low visible light transmittance and high phase transition temperature of thermochromic VO2 thin films, the preparation of ultra-thin composite low radiation films is used to solve the above problems in this paper. In this paper, the vanadium oxide thin films, doped vanadium oxide films and low radiation-vanadium oxide composite films were prepared by the combination of DC magnetron sputtering and RF magnetron sputtering. Here, our idea is to optimize the thickness and porosity of the film, so that the film has the characteristics of high permeation and decreasing phase transition temperature at the same time. In order to reduce the emissivity of the ultrathin film, we use the low radiation film to reduce the radiation rate of the ultrathin film due to its high ultraviolet radiation and infrared radiation. In the course of the study, the optical transmission, microstructure and other properties of the films were measured and characterized by using different testing methods, such as XRD,SEM, temperature transmission and so on. The conclusions are as follows: 1. The control of different sputtering time and annealing process parameters has an important effect on the overall properties of the films. Vanadium oxide thin films with good visible transmission and good infrared regulation were successfully prepared by optimizing the process parameters. The optimized process was: sputtering time 1.5 min, annealing temperature 450 鈩，
本文编号：2362077
[Abstract]:Energy conservation and environmental protection and other functional building materials have become a global problem. According to statistics, the energy used for heating, cooling and lighting accounts for about 30 percent of the total building energy consumption in China, compared with more than 40 percent in Europe such as the United Kingdom. Energy-saving coating glass is to control and utilize solar heat radiation to realize building energy saving by making appropriate film system. At present, the main energy saving glass in the market is low radiation glass, but this kind of energy saving glass has the shortcoming of limited use area and can not be adjusted intelligently to light, and vanadium oxide smart window can overcome these limitations. Is a more ideal energy-efficient building window materials. In order to solve the problems of low visible light transmittance and high phase transition temperature of thermochromic VO2 thin films, the preparation of ultra-thin composite low radiation films is used to solve the above problems in this paper. In this paper, the vanadium oxide thin films, doped vanadium oxide films and low radiation-vanadium oxide composite films were prepared by the combination of DC magnetron sputtering and RF magnetron sputtering. Here, our idea is to optimize the thickness and porosity of the film, so that the film has the characteristics of high permeation and decreasing phase transition temperature at the same time. In order to reduce the emissivity of the ultrathin film, we use the low radiation film to reduce the radiation rate of the ultrathin film due to its high ultraviolet radiation and infrared radiation. In the course of the study, the optical transmission, microstructure and other properties of the films were measured and characterized by using different testing methods, such as XRD,SEM, temperature transmission and so on. The conclusions are as follows: 1. The control of different sputtering time and annealing process parameters has an important effect on the overall properties of the films. Vanadium oxide thin films with good visible transmission and good infrared regulation were successfully prepared by optimizing the process parameters. The optimized process was: sputtering time 1.5 min, annealing temperature 450 鈩，
本文编号：2362077
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