基于辅助变压器软开关的磁控溅射电源主电路研究

发布时间：2018-02-27 17:15

本文关键词： 移相全桥环流损耗占空比丢失辅助变压器软开关　出处：《西安理工大学》2017年硕士论文　论文类型：学位论文

【摘要】：磁控溅射作为一种镀膜工艺,能有效提高材料的耐腐蚀性、耐磨损性、抗氧化性而受到重视。但磁控溅射负载变化范围大且具有非线性的特点,对磁控溅射电源提出了较高的要求。在电源输出宽范围可调的条件下,变换器损耗成为制约磁控溅射电源性能提升的重要问题。本文围绕磁控溅射电源主电路的拓扑结构、宽范围的软开关实现等问题展开研究。首先,在分析多种加辅助网络的全桥变换器的基础上,确定采用加辅助变压器ZVS全桥变换器拓扑,并对其拓扑结构和工作原理作了详细分析。该拓扑利用阻断电容对变压器原边环流进行抑制,降低了环流损耗,同时利用辅助变压器网络为滞后臂开关管提供足够的能量,使变换器能够实现宽负载范围的软开关。其次,对变换器的关键问题进行了详细的分析,主要包括滞后臂ZVS软开关的实现、变压器原边环流的抑制、占空比丢失和变压器二次侧寄生振荡等问题。然后对影响变换器性能的主要参数进行研究,推导了阻断电容、变压器励磁电感和辅助电容的计算公式。根据磁控溅射电源的设计指标,对主电路的参数进行了设计和器件选型,并在Pspicel6.3的仿真环境下对变换器的主电路进行了仿真分析,仿真结果证明了理论分析的正确性。最后,在理论分析和仿真的基础上搭建实验平台进行实验研究。实验结果表明,本文所采用的变换器拓扑具有控制简单、开关管能够实现宽负载范围的软开关、无占空比丢失、无环流损耗等优点,验证了理论分析的正确性和变换器设计的合理性。
[Abstract]:As a coating process, magnetron sputtering can effectively improve the corrosion resistance, wear resistance and oxidation resistance of materials. The high requirement for magnetron sputtering power supply is put forward. Under the condition that the output range is adjustable, converter loss becomes an important problem that restricts the performance improvement of magnetron sputtering power supply. This paper revolves around the topology structure of the main circuit of magnetron sputtering power supply. The realization of soft switching in a wide range is studied. Firstly, based on the analysis of various full-bridge converters with auxiliary networks, the topology of ZVS full-bridge converters with auxiliary transformers is determined. The topology and working principle are analyzed in detail. The topology uses the blocking capacitance to suppress the primary circulation of the transformer and reduces the circulation loss. At the same time, the auxiliary transformer network is used to provide sufficient energy for the hysteresis arm switch tube. The converter can realize the soft switch with wide load range. Secondly, the key problems of the converter are analyzed in detail, including the realization of the ZVS soft switch with the hysteresis arm, the suppression of the primary circulation of the transformer, The loss of duty cycle and the secondary side parasitic oscillation of transformer are discussed. The main parameters affecting the performance of the converter are studied and the blocking capacitance is derived. According to the design index of magnetron sputtering power supply, the parameters of the main circuit and the device selection are designed, and the main circuit of the converter is simulated and analyzed in the Pspicel6.3 simulation environment. The simulation results prove the correctness of the theoretical analysis. Finally, the experimental platform is built on the basis of theoretical analysis and simulation. The experimental results show that the topology of the converter used in this paper has simple control. The switching tube has the advantages of wide load range soft switch, no duty cycle loss, no circulation loss and so on. The correctness of the theoretical analysis and the rationality of the converter design are verified.
【学位授予单位】：西安理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM46

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