基于共质量块悬臂梁阵列的微型压电振动能量收集器关键技术研究

发布时间：2018-03-21 16:41

本文选题：MEMS　切入点：压电振动能量收集器　出处：《重庆大学》2016年硕士论文　论文类型：学位论文

【摘要】：随着微型能量收集器技术的快速发展和众多应用需求,如何实现环境动能的高效获取与高效转换,已成为微型能量收集器技术研究的重点。论文以某大型发动机故障监测系统为具体应用对象,提出了一种基于共质量块悬臂梁阵列的微型压电振动能量收集器新结构,介绍了微型压电悬臂梁阵列振动能量收集器的结构与工作原理;基于集总参数模型,分析了影响能量收集器输出性能的主要因数;采用ANSYS有限元仿真软件完成了微型压电悬臂梁阵列振动能量收集器结构参数的优化设计,制定了相应的加工工艺流程,探索了器件圆片级低真空封装的结构设计与工艺。研制出的原理样机在3 g、606 Hz的振动激励下,输出电压为11.02V,输出功率达到660.06μW。论文的主要研究工作是:(1)分析了微型压电振动能量收集器的研究现状,确定了论文的研究目标和研究内容;(2)以某大型发动机故障监测系统为具体应用对象,提出了基于共质量块悬臂梁阵列的微型压电振动能量收集器新结构,研究了微型压电振动能量收集器的工作原理;基于压电悬臂梁振动能量收集器的集总参数模型,分析了影响能量收集器输出性能的主要因数;(3)开展了应用环境研究,确定了微型压电悬臂梁阵列振动能量收集器的主要技术指标,制定了器件结构的优化途径;采用ANSYS有限元仿真软件分别完成了能量采集芯片和圆片级低真空封装结构的结构参数优化设计;(4)基于微型压电悬臂梁阵列振动能量收集器的结构及实验室MEMS工艺条件,制定了器件的加工工艺流程,采用L-Edit软件完成了掩模版图设计,采用MEMS工艺研制出了原理样机;探索了圆片级低真空键合工艺;(5)研究了器件的测试方法,搭建了测试平台,完成了样机性能测试与分析:样机在3 g、606 Hz的振动激励下,开路电压为11.02 V,输出功率为660.06μW,实验表明论文设计的共质量块微型悬臂梁阵列压电振动能量收集器的性能达到设计指标,能满足实际应用需求。
[Abstract]:With the rapid development of micro-energy collector technology and many applications, how to achieve the efficient acquisition and conversion of environmental kinetic energy, In this paper, a new structure of micro piezoelectric vibration energy collector based on common mass block cantilever array is proposed, which is based on a large engine fault monitoring system. The structure and working principle of the micro piezoelectric cantilever array vibration energy collector are introduced, and the main factors affecting the output performance of the energy collector are analyzed based on lumped parameter model. The optimization design of the structural parameters of the vibration energy collector of the micro piezoelectric cantilever array has been completed by using the ANSYS finite element simulation software, and the corresponding processing process has been worked out. The structure design and technology of wafer level low vacuum packaging are explored. The principle prototype is developed under vibration excitation of 3 g / 606 Hz. The output voltage is 11.02 V and the output power is 660.06 渭 W. the main work of this paper is to analyze the research status of the micro piezoelectric vibration energy collector. The research object and content of this paper are determined. A new structure of micro piezoelectric vibration energy collector based on common mass block cantilever array is proposed, which takes a large engine fault monitoring system as the concrete application object. Based on the lumped parameter model of piezoelectric cantilever beam vibration energy collector, the main factor affecting the output performance of the energy collector is analyzed. The main technical specifications of the vibration energy collector of the micro piezoelectric cantilever array are determined, and the optimization method of the device structure is established. ANSYS finite element simulation software is used to optimize the structure parameters of the energy acquisition chip and the wafer low vacuum packaging structure. The structure of the vibration energy collector based on the micro piezoelectric cantilever array and the MEMS process conditions in the laboratory are presented. The fabrication process of the device is established, the mask chart is designed with L-Edit software, the principle prototype is developed by using MEMS process, the wafer level low vacuum bonding process is explored and the testing method of the device is studied, and the test platform is built. The performance test and analysis of the prototype is completed: the prototype is excited by vibration of 3 g or 606 Hz. The open circuit voltage is 11.02 V and the output power is 660.06 渭 W. the experiment shows that the performance of the piezoelectric vibration energy collector designed in this paper can meet the design targets and meet the practical application requirements.
【学位授予单位】：重庆大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TM619

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