区熔硅芯炉中五孔感应加热线圈的分析与优化设计

发布时间：2018-05-20 20:18

本文选题：区熔硅芯炉 + 五孔线圈　；参考：《西安理工大学》2017年硕士论文

【摘要】：单晶硅作为微电子工业的基础材料,在集成电路和功率半导体器件的制造中得到广泛的应用,是当今信息社会的基石。随着电子行业的不断发展,对单晶硅提出了“低成本、高纯度”的要求。近年来出现了一种基于五孔感应加热线圈的区熔硅芯炉既可以满足“高纯度”的要求,也可以满足“低成本”的要求,但其所拉制的五根单晶硅棒尺寸各不相同,且呈椭圆柱状,从而导致利用率低。而硅芯炉中的感应线圈直接决定了所拉制的五根单晶硅棒的质量,因此本文主要研究五孔感应加热线圈,并对其进行优化,使其能够拉制出利用率更高的同尺寸圆柱形硅棒。通过研究五孔感应加热线圈拉制单晶的原理可知,五孔感应加热线圈的磁场直接决定了所拉制单晶硅棒的尺寸和形状。因此,本文从电磁场的基本理论出发,建立了五孔线圈的电磁场模型,计算并推导出该线圈所产生磁感应强度的表达式,分析了磁导率、电阻率、槽路长度等因素对磁场分布和大小的影响。最后根据焦耳定律以及热对流和热辐射原理对硅芯炉内温度场进行了数值分析,并推导出硅芯炉内温度场数学模型的表达式。本文采用ANSYS仿真软件对硅芯炉进行建模、加载和求解,对比分析了不同槽路长度时,五孔线圈和多晶硅母料表面的涡流场、磁场和温度场的大小和分布,仿真结果表明:d=29mm的五孔线圈既可以增加磁场的均匀度,又能够保证加热的均匀性。最后搭建了串联谐振感应加热电源平台进行实验验证,考虑实验室现有条件无法直接测量磁场的大小,本文设计了两种感应线圈,通过测量五孔线圈的五个孔上方感生电动势的大小,从而间接计算出五个孔处的磁场大小,实验结果证明了理论分析和仿真结果的正确性。
[Abstract]:As the basic material of microelectronics industry, monocrystalline silicon is widely used in the manufacture of integrated circuits and power semiconductor devices. With the development of electronic industry, the demand of low cost and high purity for monocrystalline silicon is put forward. In recent years, a kind of zone melting silicon core furnace based on five-hole induction heating coil has emerged, which can satisfy both the requirements of "high purity" and "low cost", but the five monocrystalline silicon rods drawn by the furnace have different sizes. The utility model is elliptical and columnar, resulting in low utilization rate. The induction coil in the silicon core furnace directly determines the quality of the five single crystal silicon rods drawn, so this paper mainly studies the five-hole induction heating coil, and optimizes it to make the cylindrical silicon rod of the same size with higher utilization ratio. By studying the principle of drawing single crystal by five-hole induction heating coil, it is known that the magnetic field of five-hole induction heating coil directly determines the size and shape of the single crystal silicon rod. Therefore, based on the basic theory of electromagnetic field, the electromagnetic field model of the five-hole coil is established, the expression of the magnetic induction intensity produced by the coil is calculated and deduced, and the permeability and resistivity are analyzed. The influence of channel length on magnetic field distribution and size. Finally, according to Joule's law and the principle of thermal convection and thermal radiation, the temperature field in silicon core furnace is numerically analyzed, and the mathematical model of temperature field in silicon core furnace is derived. In this paper, ANSYS simulation software is used to model, load and solve the silicon core furnace. The size and distribution of eddy current field, magnetic field and temperature field on the surface of five-hole coil and polysilicon masterbatch are compared and analyzed with different channel length. The simulation results show that the five-hole coil with 29mm diameter can not only increase the uniformity of magnetic field, but also ensure the uniformity of heating. Finally, a series resonant induction heating power supply platform is built for experimental verification. Considering that the existing conditions in the laboratory can not directly measure the size of the magnetic field, two induction coils are designed in this paper. By measuring the size of the induced electromotive force over the five holes of the five-hole coil, the magnetic field at the five holes is calculated indirectly. The experimental results prove the correctness of the theoretical analysis and the simulation results.
【学位授予单位】：西安理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM924.01;TM55

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