精密运动滑台结构及运动控制研究
发布时间：2018-11-13 15:48
【摘要】：在直线运动的驱动方式中,直线电机较传统旋转电机具有效率高、加工精度高和使用寿命长等优点,在精密仪器、医疗器械、半导体加工等诸多领域获得广泛应用。但是直线电机驱动平台作为铅垂轴使用时,需要考虑重力作用的影响。本文设计了一种基于直线电机驱动的三轴精密运动滑台,研究了精密运动滑台的机械结构与直线运动控制问题,研究表明重力平衡装置的响应速度、定位精度等动态性能是设计的关键。文中考虑精密运动滑台铅垂方向的重力作用,给出了一种平衡重力作用的结构,并对该平衡结构的快速响应性与定位精度问题进行了研究。首先,在分析论证三轴精密运动滑台总体结构设计方案的基础上,给出了直线电机、反馈元件、直线导轨等的选型、配置及非标零件的结构设计,并加工装配了一种基于直线电机驱动的三轴精密运动滑台。其次,完成了三轴精密运动滑台控制系统的设计,包括控制器和直线电机驱动器的选型、调试,该控制系统可有效地控制精密运动滑台的定位精度。再次,在Pro/E中建立精密运动滑台的三维模型并导入ADAMS软件中进行了动力学仿真,分析了平衡阻尼对平衡装置的影响。设计了直驱三轴精密运动滑台铅垂运动部件的重力平衡装置,该平衡装置可提高滑台铅垂运动的稳定性及定位精度。最后,对加装重力平衡装置的铅垂运动模块进行了定位精度测试。利用激光干涉仪测量精密运动滑台铅垂运动的定位精度和重复定位精度等参数,并经过反复的PMAC误差补偿控制提升定位精度,证明了平衡装置可满足应用要求。此外,装设重力平衡装置前后的电流环响应曲线验证了重力平衡装置可有效地保证铅垂运动的稳定性。
[Abstract]:In the driving mode of linear motion, linear motor has many advantages, such as high efficiency, high machining precision and long service life. It has been widely used in many fields, such as precision instruments, medical instruments, semiconductor processing and so on. But when the linear motor driving platform is used as the vertical axis, the influence of gravity should be considered. In this paper, a three-axis precision motion slider driven by linear motor is designed. The mechanical structure and linear motion control of the precision motion sliding table are studied, and the response speed of the gravity balancing device is shown. Dynamic performance such as positioning accuracy is the key to the design. In this paper, considering the gravity action of the vertical direction of the precision moving sliding table, a structure of balancing gravity action is given, and the rapid response of the balance structure and the problem of positioning accuracy are studied. First of all, based on the analysis and demonstration of the overall structure design scheme of the three-axis precision moving sliding table, the selection, configuration and structural design of the non-standard parts are given, such as the linear motor, the feedback element, the linear guide rail, etc. A three-axis precision motion sliding table based on linear motor driving is also processed and assembled. Secondly, the design of the three-axis precision motion sliding table control system is completed, including the selection and debugging of the controller and the linear motor driver. The control system can effectively control the positioning accuracy of the precision motion sliding table. Thirdly, the three-dimensional model of the precision sliding platform is built in Pro/E, and the dynamic simulation is carried out in ADAMS software, and the influence of the balance damping on the balancing device is analyzed. A gravity balancing device for vertical motion components of three axis precision sliding platform is designed. The balance device can improve the stability and positioning accuracy of the vertical motion of slide platform. Finally, the positioning accuracy of the vertical motion module with gravity balance device is tested. The laser interferometer is used to measure the positioning accuracy and repeat positioning accuracy of the vertical motion of the precision moving slide table. After repeated PMAC error compensation control to improve the positioning accuracy, it is proved that the balancing device can meet the requirements of application. In addition, the response curve of the current loop before and after the installation of the gravity balance device verifies that the gravity balance device can effectively ensure the stability of the vertical motion.
【学位授予单位】：北方工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TM359.4
本文编号：2329598
[Abstract]:In the driving mode of linear motion, linear motor has many advantages, such as high efficiency, high machining precision and long service life. It has been widely used in many fields, such as precision instruments, medical instruments, semiconductor processing and so on. But when the linear motor driving platform is used as the vertical axis, the influence of gravity should be considered. In this paper, a three-axis precision motion slider driven by linear motor is designed. The mechanical structure and linear motion control of the precision motion sliding table are studied, and the response speed of the gravity balancing device is shown. Dynamic performance such as positioning accuracy is the key to the design. In this paper, considering the gravity action of the vertical direction of the precision moving sliding table, a structure of balancing gravity action is given, and the rapid response of the balance structure and the problem of positioning accuracy are studied. First of all, based on the analysis and demonstration of the overall structure design scheme of the three-axis precision moving sliding table, the selection, configuration and structural design of the non-standard parts are given, such as the linear motor, the feedback element, the linear guide rail, etc. A three-axis precision motion sliding table based on linear motor driving is also processed and assembled. Secondly, the design of the three-axis precision motion sliding table control system is completed, including the selection and debugging of the controller and the linear motor driver. The control system can effectively control the positioning accuracy of the precision motion sliding table. Thirdly, the three-dimensional model of the precision sliding platform is built in Pro/E, and the dynamic simulation is carried out in ADAMS software, and the influence of the balance damping on the balancing device is analyzed. A gravity balancing device for vertical motion components of three axis precision sliding platform is designed. The balance device can improve the stability and positioning accuracy of the vertical motion of slide platform. Finally, the positioning accuracy of the vertical motion module with gravity balance device is tested. The laser interferometer is used to measure the positioning accuracy and repeat positioning accuracy of the vertical motion of the precision moving slide table. After repeated PMAC error compensation control to improve the positioning accuracy, it is proved that the balancing device can meet the requirements of application. In addition, the response curve of the current loop before and after the installation of the gravity balance device verifies that the gravity balance device can effectively ensure the stability of the vertical motion.
【学位授予单位】：北方工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TM359.4
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