冲击式压电马达建模仿真与激励电路研究
发布时间：2019-04-03 15:43
【摘要】：冲击式压电马达以压电陶瓷为驱动元件,在锯齿波信号作用下激励定子产生不对称的周期性运动,利用惯性摩擦作用形成定子和动子界面的粘滑运动,从而推动动子实现单方向的步进位移。该类马达除可工作在上述亚微米级位移分辨率的步进驱动模式,亦可工作在运动速度达数毫米每秒的平滑驱动模式,还可工作在纳米级位移分辨率的扫描驱动模式,有效地缓解了大行程和高精度之间的矛盾,在跨尺度微型精密定位操作系统中表现出良好的发展前景。然而,压电陶瓷元件电压激励存在的迟滞、蠕变等非线性因素,不仅影响扫描驱动模式下的定位精度,步进驱动模式下的步进运动亦会因此而累积误差,严重影响到冲击式压电马达的实际应用效果。本论文通过冲击式压电马达建模仿真和激励电路研究,探索提高该类马达三种驱动模式下开环控制精度的方法,主要工作包括:1.建立冲击式压电马达动力学理论模型,仿真分析三种驱动模式下的运动特性以及影响定位精度的主要因素;2.分析压电陶瓷典型的激励电路,设计适用于冲击式压电马达的电荷激励电路,分析主要电路参数对驱动性能的影响;3.搭建实验测试平台,对比分析直线冲击式压电马达N-422.50在电压、电荷激励下的驱动性能。测试结果表明:电荷激励电路可满足该类马达三种驱动模式的工作要求;扫描驱动模式下,电荷激励在0.5~100Hz范围内可获得较好的线性度;步进驱动模式下,电荷激励在1~100Hz范围内具有稳定的步进位移。本论文研究表明电荷激励用于压电冲击驱动机构跨尺度精密定位具有良好的研究价值和应用前景。
[Abstract]:The impact piezoelectric motor takes piezoelectric ceramic as the driving element and stimulates the stator to produce asymmetric periodic motion under the action of the sawtooth wave signal. The viscous sliding motion between the stator and the moving sub-interface is formed by using the inertial friction action. In this way, the moving sub can realize one-way step-by-step displacement. This kind of motor not only can work in the step drive mode of the sub-micron displacement resolution, but also can work in the smooth driving mode of several millimeters per second, and can also work in the scanning drive mode of nanometer displacement resolution. It effectively alleviates the contradiction between large stroke and high precision, and shows a good prospect of development in the cross-scale micro-precision positioning operating system. However, non-linear factors, such as hysteresis and creep, which exist in voltage excitation of piezoelectric ceramic elements, not only affect the positioning accuracy in scan-driven mode, but also accumulate errors in step-by-step motion in step-driven mode. It seriously affects the practical application effect of impact piezoelectric motor. In this paper, through modeling and simulation of impact piezoelectric motor and research of excitation circuit, the methods to improve the precision of open-loop control in three driving modes of this kind of motor are explored. The main work is as follows: 1. The dynamic theoretical model of impact piezoelectric motor is established, and the motion characteristics under three driving modes and the main factors affecting positioning accuracy are simulated and analyzed. The typical excitation circuit of piezoelectric ceramics is analyzed, the charge excitation circuit suitable for impact piezoelectric motor is designed, and the influence of main circuit parameters on driving performance is analyzed. The driving performance of linear impingement piezoelectric motor Nx422.50 under voltage and charge excitation is compared and analyzed. The test results show that the charge excitation circuit can meet the requirements of the three driving modes of this kind of motor, and in the scanning driving mode, the charge excitation can obtain better linearity in the range of 0.5~100Hz. In the step drive mode, the charge excitation has a stable step displacement in the range of 1~100Hz. This paper shows that charge excitation has good research value and application prospect in cross-scale precise positioning of piezoelectric impact actuators.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM32
[Abstract]:The impact piezoelectric motor takes piezoelectric ceramic as the driving element and stimulates the stator to produce asymmetric periodic motion under the action of the sawtooth wave signal. The viscous sliding motion between the stator and the moving sub-interface is formed by using the inertial friction action. In this way, the moving sub can realize one-way step-by-step displacement. This kind of motor not only can work in the step drive mode of the sub-micron displacement resolution, but also can work in the smooth driving mode of several millimeters per second, and can also work in the scanning drive mode of nanometer displacement resolution. It effectively alleviates the contradiction between large stroke and high precision, and shows a good prospect of development in the cross-scale micro-precision positioning operating system. However, non-linear factors, such as hysteresis and creep, which exist in voltage excitation of piezoelectric ceramic elements, not only affect the positioning accuracy in scan-driven mode, but also accumulate errors in step-by-step motion in step-driven mode. It seriously affects the practical application effect of impact piezoelectric motor. In this paper, through modeling and simulation of impact piezoelectric motor and research of excitation circuit, the methods to improve the precision of open-loop control in three driving modes of this kind of motor are explored. The main work is as follows: 1. The dynamic theoretical model of impact piezoelectric motor is established, and the motion characteristics under three driving modes and the main factors affecting positioning accuracy are simulated and analyzed. The typical excitation circuit of piezoelectric ceramics is analyzed, the charge excitation circuit suitable for impact piezoelectric motor is designed, and the influence of main circuit parameters on driving performance is analyzed. The driving performance of linear impingement piezoelectric motor Nx422.50 under voltage and charge excitation is compared and analyzed. The test results show that the charge excitation circuit can meet the requirements of the three driving modes of this kind of motor, and in the scanning driving mode, the charge excitation can obtain better linearity in the range of 0.5~100Hz. In the step drive mode, the charge excitation has a stable step displacement in the range of 1~100Hz. This paper shows that charge excitation has good research value and application prospect in cross-scale precise positioning of piezoelectric impact actuators.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM32
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