惯性冲击式直线电机的设计及其应用

发布时间：2018-01-30 05:37

本文关键词： 压电驱动器超声电机惯性冲击式电机精密调焦位移分辨率　出处：《南京航空航天大学》2014年硕士论文　论文类型：学位论文

【摘要】：随着科学技术的不断进步和发展,许多领域都对精密驱动和定位提出了更高的要求,不仅要有较高的分辨率,而且要有足够的输出力和较大的输出刚度,传统形式的驱动器已经不能满足这些要求。基于压电材料制成的压电驱动器具有惯性小、响应快、分辨率高等优点,可以满足驱动元器件小型化、微型化的要求。本课题创新性地利用压电材料作为驱动元件,设计了2套用于显微镜物镜精密调焦的压电驱动器。第一套装置利用旋转型超声电机作为动力源,驱动物镜完成精密定位的功能,实现显微镜精密调焦的目的;第二套装置利用压电叠堆作为驱动源,驱动显微镜物镜完成精密定位的功能。分别加工制造了样机并开展了相关的实验研究。本文主要内容如下:1.介绍了压电驱动器的概念,综述了压电驱动器的分类和应用场合,对行波型旋转超声电机和惯性冲击式电机的特点和应用研究做了概述。2.介绍了压电材料的性质和参数,论述了压电叠堆的结构、基本特性和使用注意事项。3.提出了以TRUM-30型旋转超声电机为驱动源的精密调焦装置设计方案。分别设计了各组成机构的结构和尺寸,根据预定设计要求对柔性机构进行了有限元分析。加工制造了样机并进行了实验,针对调焦装置的关键性能指标,如位移分辨率、工作性能开展了实验研究。实验结果表明:该精密调焦装置工作性能稳定,能够实现显微镜物镜的双向位移调节,其最小位移分辨率可以达到15μm。4.基于惯性冲击理论,提出了以压电叠堆为驱动源的惯性冲击式直线电机的设计方案。选定了压电叠堆的类型和型号,分别对电机的各组成机构进行了设计。加工制造了样机并进行了实验,针对电机的关键性能指标,如位移分辨率、性能稳定性开展了实验研究。实验结果表明:该惯性冲击式电机工作性能平稳,步距均匀,可以实现显微镜物镜的双向位移调节,其位移分辨率最小可以达到2μm的精度。
[Abstract]:With the continuous progress and development of science and technology, many fields have put forward higher requirements for precision driving and positioning, not only to have a higher resolution, but also to have sufficient output force and greater output stiffness. Traditional actuators can not meet these requirements. Piezoelectric actuators based on piezoelectric materials have the advantages of small inertia, fast response, high resolution and so on, which can meet the miniaturization of driving components. According to the requirement of miniaturization, two sets of piezoelectric actuators for precision focusing of microscope objective lens are designed by using piezoelectric material as driving element. The first set of devices uses rotary ultrasonic motor as power source. The purpose of precision focusing of microscope is realized by driving objective lens to complete precise positioning function. The second device uses piezoelectric stack as the driving source. The precision positioning function of driving microscope objective lens is realized. The prototype is manufactured and the related experimental research is carried out. The main contents of this paper are as follows: 1. The concept of piezoelectric actuator is introduced. The classification and application of piezoelectric actuators are reviewed. The characteristics and application of traveling wave rotary ultrasonic motors and inertial impulse motors are summarized. 2. The properties and parameters of piezoelectric materials are introduced. The structure of piezoelectric stack is discussed. 3. The design scheme of precision focusing device with TRUM-30 rotary ultrasonic motor as driving source is put forward, and the structure and size of each mechanism are designed respectively. The finite element analysis of the flexible mechanism is carried out according to the predetermined design requirements. The prototype is manufactured and tested. The key performance indexes of the focusing device, such as displacement resolution, are analyzed. The experimental results show that the precision focusing device has stable working performance and can realize the bidirectional displacement adjustment of the microscope objective. The minimum displacement resolution can reach 15 渭 m.4.Based on the theory of inertial shock, the design scheme of inertial shock linear motor with piezoelectric stack as driving source is proposed. The type and type of piezoelectric stack are selected. Each component mechanism of the motor is designed, the prototype is manufactured and experimented, aiming at the key performance index of the motor, such as displacement resolution. The experimental results show that the inertial impulse motor has a stable working performance and a uniform step distance, which can realize the bi-directional displacement adjustment of the microscope objective lens. The minimum displacement resolution can reach 2 渭 m precision.
【学位授予单位】：南京航空航天大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TM359.4

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