基于共面去耦结构的空间三维电场测量方法

发布时间：2018-04-26 12:33

本文选题：MEMS电场传感器 + 维电场　；参考：《电子与信息学报》2014年10期

【摘要】：为了准确测量空间3维电场,解决作用于电场传感器的电场各分量之间的耦合干扰问题,该文提出一种新型的基于共面去耦结构的空间3维电场探测方法。区别于在空间的X,Y,Z 3个方向上进行3维布置传统测量思路,该文提出采用3个不共线的平面分布电场敏感单元,利用电场耦合灵敏度矩阵实现电场3个正交分量的准确解调。采用3个基于微机电系统(MEMS)技术的振动微结构电场敏感单元成功制作出3维电场传感器样机。该文设计出一种可实现任意角度旋转的新的传感器夹具,并构建了3维电场测试标定系统。实验表明,该文研制的3维电场传感器可实现电场3个分量的准确测量,结构简单,消除了3个电场分量之间的耦合干扰,提高了测量精度。
[Abstract]:In order to accurately measure the three-dimensional electric field in space and solve the problem of coupling interference between the components of the electric field acting on the electric field sensor, a new spatial three-dimensional electric field detection method based on coplanar decoupling structure is proposed in this paper. Different from the traditional 3D measurement method in three directions of space, this paper presents three non-collinear planar distributed electric field sensing elements, and realizes the accurate demodulation of the three quadrature components of the electric field by using the coupling sensitivity matrix of the electric field. The three dimensional electric field sensor prototype is successfully fabricated by using three vibrating micro-structure electric field sensing units based on MEMS / MEMS technology. In this paper, a new sensor fixture which can rotate at any angle is designed, and a 3D electric field measurement and calibration system is constructed. The experimental results show that the three dimensional electric field sensor developed in this paper can accurately measure the three components of the electric field, and the structure is simple, the coupling interference between the three electric field components is eliminated, and the measurement accuracy is improved.
【作者单位】：中国科学院电子学研究所;中国科学院大学;北京大学微电子学研究院;
【基金】：国家863计划项目(2011AA040405) 国家自然科学基金(61101049,61201078,61302032,61327810)资助课题
【分类号】：TP212;TM937

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