聚合物MEMS磁扭转微镜电流传感特性研究

发布时间：2018-06-06 13:59

本文选题：聚合物微机电系统(MEMS) + 磁扭转微镜　；参考：《光电子·激光》2015年03期

【摘要】：提出一种基于聚合物材料的新型微机电系统(MEMS)交流电传感器,对其关键部件聚合物MEMS磁扭转微镜的特性进行研究。磁扭转微镜基体材料采用聚碳酸酯(PC),扭转梁采用金属材料制作,永磁体内置于扭转微镜中,被聚合物材料所包埋,磁扭转微镜的反射面为反射光栅结构。对扭转微镜的特征参数对扭转力矩和扭转角度的影响进行了分析。结果表明,磁扭转微镜的力矩与通电导线的电流大小成正比,微镜稳态扭转振动时最大扭转角度与导线交流电流(a.c.)幅度成正比;扭转梁长度越长,扭转角幅度越大;而稳态振动扭转角幅度随着扭转梁半径的增大而减小。通过对扭转微镜反射光栅0级衍射光的接收与解调,得到归一化光强测量电流的灵敏度可达0.024/A。
[Abstract]:A novel MEMS AC sensor based on polymer materials is proposed. The characteristics of the key component of the MEMS magnetotorsion micromirror are studied. The matrix material of magnetic torsional micromirror is polycarbonate and the torsional beam is made of metal material. The permanent magnet is embedded in the torsional micromirror and is covered by polymer material. The reflection surface of the magnetic torsional micromirror is a reflective grating structure. The effect of characteristic parameters of torsional micromirror on torsional torque and torsional angle is analyzed. The results show that the torque of the magnetic torsional micromirror is proportional to the current of the conductor, and the maximum torsional angle of the micromirror under steady torsional vibration is proportional to the AC current of the conductor. The longer the length of torsional beam, the greater the amplitude of torsion angle, while the amplitude of steady vibration torsion angle decreases with the increase of torsional beam radius. By receiving and demodulating the 0-order diffraction light of the torsional micromirror reflecting grating, the sensitivity of the normalized light intensity measurement current can be as high as 0.024% A.
【作者单位】：华侨大学信息科学与工程学院;泉州师院应用科技学院;
【基金】：福建省自然科学基金(11151054) 福建省光传输与变换重点实验室开放课题(2014101)资助项目
【分类号】：TP212;TM76

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