六自由度磁浮电机建模及控制研究

发布时间：2018-09-15 06:02

【摘要】：磁浮平面电机具有结构简单、动态特性好、定位精度高等特点，广泛应用于光刻机六自由度运动控制场合。本文以六自由度动磁式磁浮平面电机为研究对象，在分析磁场的基础上，建立了磁浮平面电机在定子磁场中的受力和力矩模型，研究了直接力旋量电机解耦方法，实现了磁浮平面电机的解耦控制。将重复控制和PID控制相结合，提高了6-DOF磁浮电机的控制精度。首先，推导Halbach阵列磁感应强度分布，综合磁场基本方程以及边界条件，获得磁感应强度分布谐波模型。根据谐波模型，将单个线圈进行简化，应用洛仑兹力公式，解决了永磁阵列磁场对单线圈的作用力和力矩问题。根据作用力与反作用力关系，分析了Halbach永磁阵列作为动子时的受力和力矩分布，为消除力矩干扰提供理论依据。其次，为了消除dq0解耦引入的干扰力矩，，分析了动磁式平面电机输入控制电流与输出的力和力矩之间的耦合关系。提出了直接力旋量解耦方法，实现电流与电磁力和力矩的独立解耦控制，运行稳定、效果良好。最后，建立了磁浮平面电机仿真模型，分析了Halbach永磁阵列作为电机动子时的受力情况。并且推导出动子永磁阵列的动力学模型，并将其与电磁力和力矩模型相结合。采用基于改进重复控制的PID控制算法，解决了传统PID反馈算法的精度问题。仿真结果表明，磁浮平面电机每个自由度位置跟踪误差能够达到纳米级要求，说明改进的磁浮重复控制方法可以应用于6-DOF磁浮电机控制中，验证了所提方法的正确性和有效性。
[Abstract]:The maglev planar motor is widely used in the six degree of freedom motion control of lithography machine because of its simple structure, good dynamic characteristics and high positioning accuracy. In this paper, based on the analysis of magnetic field, the force and torque model of maglev plane motor in stator magnetic field is established, and the decoupling method of direct force spinning motor is studied. The decoupling control of maglev plane motor is realized. The control precision of 6-DOF maglev motor is improved by combining repetitive control with PID control. Firstly, the magnetic induction intensity distribution of Halbach array, the basic magnetic field equation and boundary conditions are derived, and the harmonic model of magnetic induction intensity distribution is obtained. According to the harmonic model the single coil is simplified and the Lorentz force formula is applied to solve the problem of the force and torque of the permanent magnet array magnetic field on the single coil. According to the relationship between force and reaction force, the force and torque distribution of Halbach permanent magnet array are analyzed, which provides a theoretical basis for eliminating torque interference. Secondly, in order to eliminate the disturbance torque introduced by dq0 decoupling, the coupling relationship between the input control current and the output force and torque of the moving magnetic planar motor is analyzed. A direct force spinor decoupling method is proposed to realize the decoupling control of current, electromagnetic force and torque independently. The method is stable and has a good effect. Finally, the simulation model of planar maglev motor is established, and the force acting on Halbach permanent magnet array is analyzed. The dynamic model of the permanent magnet array is derived and combined with the electromagnetic force and torque model. The PID control algorithm based on improved repetitive control is used to solve the accuracy problem of the traditional PID feedback algorithm. The simulation results show that the position tracking error of each degree of freedom of the maglev plane motor can meet the requirement of nanometer level. The improved repetitive control method of maglev can be applied to the control of 6-DOF maglev motor, and the correctness and effectiveness of the proposed method are verified.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TM301.2

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