基于绝缘体上硅的一种改进的Mach-Zehnder声光调制器

发布时间：2017-12-27 08:48

本文关键词：基于绝缘体上硅的一种改进的Mach-Zehnder声光调制器　出处：《物理学报》2016年01期 　论文类型：期刊论文

【摘要】：传统的基于绝缘体上硅的Mach-Zehnder(MZ)声光调制器中,叉指换能器位于两臂的同一侧.为实现高的调制效率,声表面波的波峰和波谷分别调制MZ干涉仪的两臂,这要求控制MZ干涉仪两臂之间的距离为奇数倍声波半波长.但实际上由于传播过程中衬底材料的变化,声波波长会变大,这会导致两臂的间距难以准确设置.另一方面,声波在传播过程中经过MZ干涉仪的一臂后会发生衰减,降低了对另一臂的调制效果,影响了整体的调制效率.本文针对这些问题给出了一种解决方案,把叉指换能器放在MZ波导两臂之间,确保MZ干涉仪两臂到叉指电极中心距离相等.采用有限元法,首先对新提出的结构进行分析,然后通过声光互作用原理得到了材料的折射率变化;进而研究了波导类型、波导宽度、氧化锌厚度及叉指对数等因素对声光调制效率的影响,并对声光调制器的结构参数进行了优化以提高其性能.基于COMSOL Multiphysics的仿真结果表明,当条波导宽度为6μm,氧化锌只覆盖有叉指电极的部分且厚度为2.2μm,控制叉指电极数目为50对时,波导有效折射率变化在驱动电压为1 V时可以达到4.08×10~(-4),比传统结构提高了12%.
[Abstract]:Silicon on insulator based on traditional Mach-Zehnder (MZ) acousto-optic modulator, interdigital transducer located in the same side arms. To achieve high modulation efficiency, surface acoustic wave peaks and troughs are modulated MZ interferometer arms, the control requirements of MZ between the two arms of the interferometer distance is half wavelength. But sound odd times in fact, due to changes in substrate material in the propagation process, the acoustic wavelength becomes larger, which leads to the difficult to accurately set the distance between two arms. On the other hand, will decay in the process of sound propagation through the MZ interferometer arm, reduces the modulation effect on the other hand, the effect of modulation efficiency. In this paper these problems are given a solution, the interdigital transducer placed between MZ waveguide arms, ensure that the MZ interferometer arms to the interdigital electrode distance equal to center. By using the finite element method, firstly the structure of a new Through the analysis, then the acousto-optic interaction principle to obtain the refractive index change; then study the waveguide type, waveguide width, thickness and Zinc Oxide interdigital affecttheir and other factors on the acousto-optic modulation efficiency, and the structure parameters of the acousto-optic modulator is optimized to improve its performance. The simulation results show that the COMSOL Multiphysics based on when the waveguide width is 6 m, Zinc Oxide only covered with interdigital electrode parts and the thickness is 2.2 m, control of the interdigital electrode number of 50 pairs of effective refractive index changes in the 1 V driving voltage can reach 4.08 * 10~ (-4), 12%. higher than the traditional structure
【作者单位】：浙江大学信息与电子工程学院集成光电子实验室;
【基金】：国家重点基础研究发展计划(批准号:2013CB632105) 国家自然科学基金(批准号:61177055,61307074) 浙江省杰出青年科学基金(批准号:LR15F050002) 中央高校基本科研业务费专项资金资助的课题~~
【分类号】：TN761
【正文快照】： 频率高,光束与声波以一定角度斜入射,此时声光1引言晶体相当于一个“立体光栅”,这种情况称之为布拉格衍射[12],而拉曼-奈斯衍射[13-15]主要应用于声基于绝缘体上硅(SOI)材料的硅基集成光子学光作用长度短、声波频率低的器件中,布拉格型声是近年来的研究热点[1-3],相较于基于

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