LED质检装备机械精度标定方法研究与应用

发布时间：2018-01-04 18:15

本文关键词：LED质检装备机械精度标定方法研究与应用　出处：《华中科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：LED质检装备是LED芯片封装前,对其进行光电参数检测、等级划分和归类的设备的统称。在检测、分选前需要对移送系统进行机械精度标定,以确定核心部件与工艺相关的功能参数,为实际生产提供准确参考。标定的精度影响后续工艺参数设置决策,最终影响产品质量。同时,提高标定效率有利于研制设备的产业化。本文以移送系统的机械精度标定为研究对象,研究了机械精度标定的方法并实际应用于现有设备,规范了标定程序、提高了测量效率和精度。主要内容有:从LED芯片检测、分选工艺着手,结合移送系统的传动结构,分析了LED质检装备机械精度的标定需求。针对各项标定特性,分析制定了相应的可行方案。针对X-Y工作台定位误差测量,对激光干涉测长误差进行了系统分析。设计了测量夹具简化了测量组件的安装和光路的准直,减少了由于安装导致的测量误差、提高了测量效率。然后,基于PMAC的误差补偿机制,对定位误差进行了必要补偿,满足了设计需要。针对偏心轮从动件位置曲线的标定,设计了基于激光三角法和接触测量的标定方法并通过实验对两者进行了比较。特别分析了非合作表面散射特性对激光三角法测量精度的影响,并设计了测量辅具,一方面,改善了被测表面的散射特性,提高了测量精度;另一方面也实现了多部件的同工位标定,还减少了激光测量头与被测件之间相对距离的调整工作量。最后针对摆臂取、放芯片力的标定,对不同型号的吸嘴与摆臂的组合进行了取、放力标定。结合摆臂位置曲线共同为芯片取、放的位-力控制提供了可靠基础。
[Abstract]:LED quality inspection equipment is the general name of the photoelectric parameter detection, classification and classification of LED chip before packaging. Before testing and sorting, it is necessary to calibrate the mechanical accuracy of the transfer system. In order to determine the core components and process related functional parameters, for actual production to provide an accurate reference. Calibration accuracy affects the subsequent process parameters set decision, and ultimately affects the quality of the product. At the same time. Improving the calibration efficiency is beneficial to the industrialization of the development equipment. This paper takes the mechanical precision calibration of the transfer system as the research object, studies the method of the mechanical precision calibration and applies it to the existing equipment, and standardizes the calibration program. The measurement efficiency and precision are improved. The main contents are as follows: starting from the LED chip detection and sorting process, combining with the transmission structure of the transfer system. The calibration requirements of mechanical accuracy of LED quality inspection equipment are analyzed. According to the calibration characteristics, the corresponding feasible scheme is analyzed and the positioning error measurement of X-Y table is made. The measurement fixture is designed to simplify the installation of the measuring module and the collimation of the optical path, reduce the measurement error caused by the installation, and improve the measuring efficiency. Based on the error compensation mechanism of PMAC, the positioning error is compensated to meet the design needs. The calibration of the position curve of the eccentric wheel follower is carried out. The calibration methods based on laser triangulation and contact measurement are designed and compared through experiments, especially the influence of non-cooperative surface scattering characteristics on the measurement accuracy of laser triangulation is analyzed. On the one hand, the scattering characteristics of the measured surface are improved and the measurement accuracy is improved. On the other hand, the calibration of multiple components is realized, and the adjustment of relative distance between the laser measuring head and the measured part is reduced. Finally, the calibration of the chip force is carried out according to the swing arm. The combination of different types of suction nozzle and pendulum arm is used to calibrate the releasing force, and the position curve of the pendulum arm is combined to provide a reliable basis for the position and force control of the chip.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN312.8

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