容性耦合电负性氧等离子体的激光诱导光致剥离技术诊断研究

发布时间：2018-01-07 12:13

本文关键词：容性耦合电负性氧等离子体的激光诱导光致剥离技术诊断研究　出处：《核聚变与等离子体物理》2017年01期 　论文类型：期刊论文

【摘要】：采用波长532nm的高能脉冲激光束照射40.68MHz激发的容性耦合氧等离子体,并给处于激光束中央的探针施加一定的正偏压,由此诊断氧等离子体的空间电位和电负度。实验结果表明,探针偏压从0V逐渐增加时,探针搜集的电流波形从V型向倒U型转变,转变电压点正是电负性等离子体的空间电位。尝试着给出了运用激光诱导光致剥离技术诊断电负性等离子体空间电位的经验方法。另外,探针上施加的正偏压高于等离子体空间电位时,等离子体的电负度基本保持不变。实验还表明,氧等离子体的电负度随着射频输入功率的增加而呈现下降的趋势。
[Abstract]:The capacitive coupled oxygen plasma excited at 40.68 MHz was irradiated by a high-energy pulsed laser beam at 532 nm, and a certain positive bias was applied to the probe in the center of the laser beam. The experimental results show that when the probe bias increases from 0 V, the current waveform collected by the probe changes from V type to inverted U type. The transition voltage point is precisely the space potential of electronegative plasma. An empirical method for diagnosing the spatial potential of electronegativity plasma by laser-induced photolithography is presented in this paper. When the positive bias voltage applied on the probe is higher than the plasma space potential, the electric negative degree of the plasma remains basically unchanged. The electronegativity of oxygen plasma decreases with the increase of RF input power.
【作者单位】：苏州大学物理与光电·能源学部;
【基金】：国家自然科学基金(11175127)
【分类号】：O53;TN249
【正文快照】： 1引言且具有良好的时间与空间分辨率。然而,在电负性低气压高密度等离子体由于离子通量和能量等离子体中,由于负离子与电子质量的巨大差异,的可控性而在微纳电子工业的材料表面生长、表面探针诊断过程中鞘层电位及鞘层厚度与电正性等刻蚀和材料表面改性等领域有着广泛的应用[1

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