硅烷热解多晶硅气相沉积反应模型分析与验证

发布时间：2018-01-08 16:33

本文关键词：硅烷热解多晶硅气相沉积反应模型分析与验证　出处：《人工晶体学报》2017年02期 　论文类型：期刊论文

【摘要】：在综述现有硅烷热解反应机理的基础上,针对Ho等人提出的气相和表面反应机理,采用二维边界层反应模型和CHEMKIN软件,对水平单基片CVD反应器进行模拟分析,计算结果与文献报道的实验数据拟合良好;通过改变硅烷进气浓度和进气温度,分析沉积速率的变化和各表面反应的贡献率,得到硅微粉再沉积过程随浓度和温度的变化规律;使用上述机理模型,计算了硅烷流化床对应的操作温度和硅烷浓度条件下的沉积速率,与文献报道测量结果比较,误差在合理范围,表明该机理适用于硅烷流化床化学气相沉积过程的CFD耦合模拟。
[Abstract]:Based on summarizing the existing silane pyrolysis reaction mechanism, the gas phase and surface reaction mechanism proposed by Ho et al, the two-dimensional boundary layer reaction model and CHEMKIN software, simulation analysis of the level of single substrate CVD reactor, the calculation results with the experimental data reported in the literature to good; by changing the inlet temperature and inlet concentration of silane analysis, the variation of the deposition rate and the surface reaction and the rate of contribution by silicon powder deposition process changes with temperature and concentration; the mechanism model, the deposition rate corresponding to the operating temperature of the fluidized bed silane and silane concentration conditions were calculated and compared with the measurement results reported in the literature, the error is in a proper range, that the simulation of CFD coupling mechanism for silane fluidized bed chemical vapor deposition process.

【作者单位】：华东理工大学资源与环境工程学院煤气化及能源化工教育部重点实验室;
【基金】：国家自然科学基金(21275085)
【分类号】：TN304.12
【正文快照】： 1引言高纯多晶硅是光伏电池生产的重要原材料。生产太阳能级多晶硅的方法主要有2种,即以三氯氢硅为原料的改良西门子法和以硅烷为原料的流化床法。其中,改良西门子法虽然比较成熟,但是投资高、能耗大、污染大,在激烈的国际竞争中或将丧失市场优势。相比之下,硅烷流化床法有以

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