二维经验模态分解在工程表面形貌误差评定中的应用

发布时间：2018-01-08 17:00

本文关键词：二维经验模态分解在工程表面形貌误差评定中的应用　出处：《光学精密工程》2017年02期 　论文类型：期刊论文

【摘要】：针对目前表面微观形貌面形误差分离方法中存在边界畸变及自适应差等缺点,提出了将具有自适应时频分辨能力的二维经验模态分解算法(bidimensional empirical mode decomposition,BEMD)应用于三维工程表面面型误差分离中,同时用Riesz变换构造单演信号,计算信号整体的频率特征,完成对二维经验模态分解算法的终止准则的改进,使其能严格按照ISO4287所规定的截止波长分离三维表面各频段形貌误差。仿真结果表明,本文新方法相比于国标ISO中高斯滤波以及常用小波滤波,在分离三维工程粗糙表面各面型误差时,所得分离图形效果远优于传统方法所得,且各频段误差对应的三维评定参数误差均小于5%。最后对光学镀膜元件实例进行分析,结果表明该算法能够很好地分离各形貌误差的的空间信息,所得参数评定基准面相对传统方法不存在边界畸变等问题,因此该方法在实际工程表面评定应用中具有可行性。
[Abstract]:To solve the drawbacks of boundary distortion and adaptive differential method of error separation surface the surface morphology, is proposed with the two-dimensional empirical mode adaptive time-frequency resolution decomposition algorithm (bidimensional empirical mode decomposition, BEMD) applied to the 3D engineering surface error separation, and Riesz transformation of the monogenic signal calculation the frequency characteristics of signal, improve the termination criteria for two-dimensional empirical mode decomposition algorithm, which can be in strict accordance with the provisions of the ISO4287 cutoff wavelength of each frequency band separation of 3D surface profile error. The simulation results show that the new method in this paper compared to the Gauss national standard ISO filter and wavelet filter used in separation, the 3D Engineering rough surface surface error, the separation of the resulting graphics effect is much better than the traditional method, and the frequency error of the corresponding three-dimensional evaluation parameters error The difference was less than 5%. and finally carries on the analysis to the optical coating components as an example, the results show that the spatial information of the algorithm can well separate the morphology error, there is no problem of boundary distortion parameters evaluation reference surface relative to the traditional method, so this method is feasible in the application of surface evaluation in practical engineering.

【作者单位】：福州大学机械工程及自动化学院;福建省福光股份有限公司;
【基金】：国家自然科学基金资助项目(No.51375094) 福建省自然科学基金资助项目(No.2015J01195) 清华大学摩擦学国家重点实验室开放基金资助项目(No.SKLTKF13B02) 福州市科技局资助项目(No.2014-G-74) 福州大学人才基金资助项目(No.XRC-1576)
【分类号】：TN713;TB9
【正文快照】： 1引言在计量学领域,产品功能特征的评定主要取决于产品表面特征信息。而表面形貌在其横向和纵向轮廓中包含复杂的表面不平整度,主要是表面粗糙度、表面几何形状误差、以及介于两者之间的表面波纹度等误差[1]。因此,如何准确分离获得表面形貌的各误差特征成分成为产品表面功能

【相似文献】