半导体设备预防性维护建模与优化方法研究

发布时间：2018-01-13 20:45

本文关键词：半导体设备预防性维护建模与优化方法研究　出处：《系统工程理论与实践》2017年03期 　论文类型：期刊论文

【摘要】：半导体生产线造价昂贵,制造工艺复杂.其维护具有维护费用高、维护难度大等特点.为了降低生产系统的整体维护成本,保证整个生产系统的稳定运行,本文通过伽马过程描述设备退化规律,对设备的衰退情况进行分类维护.针对随机退化的生产线提出考虑机会维护的预防性维护建模方法.以总维护费用最小化为目标,建立了维修费用模型,结合更新定理给出了模型求解的方法,对检测周期等参数进行优化分析.并分析了检测成本、间隔时间相互影响关系.仿真结果表明建立的预防性维护模型可行且有效.
[Abstract]:Semiconductor production line is expensive in cost and complex in manufacturing process. Its maintenance is characterized by high maintenance cost and difficult maintenance. In order to reduce the overall maintenance cost of the production system and ensure the stable operation of the whole production system. In this paper, the law of equipment degradation is described by gamma process. A preventive maintenance modeling method considering opportunity maintenance is proposed for the randomly degraded production line. Aiming at minimizing the total maintenance cost, the maintenance cost model is established. Combined with the renewal theorem, the method of solving the model is given, and the parameters such as the detection period are optimized and the detection cost is analyzed. The simulation results show that the proposed preventive maintenance model is feasible and effective.
【作者单位】：广东工业大学机电工程学院;
【基金】：国家自然科学基金(51275093)~~
【分类号】：TN305
【正文快照】： i引言半导体生产线⑴是造价昂贵、工艺复杂的集成系统,这其中涉及到氧化、光刻、淀积、扩散、掺金、光刻等一系列复杂的工艺流程,生产过程中若某个环节所对应的生产设备出现故障则有可能出现大批量的半成品或成品报废,这将对企业的生产效益造成沉重的负担;以生产LED芯片的金

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