基于有限元方法的光刻机工件台线管组件结构优化

发布时间：2018-01-14 01:05

本文关键词：基于有限元方法的光刻机工件台线管组件结构优化　出处：《清华大学学报(自然科学版)》2017年08期 　论文类型：期刊论文

更多相关文章： 工件台 线管组件 扰动力 结构优化

【摘要】：光刻机工件台是光刻机的关键子系统,其中的线管组件是其传输信号、动力及冷却液等必不可少的组成部分。线管组件产生的扰动力会恶化工件台系统的超精密运动性能,因此抑制线管组件扰动力对提高工件台系统的运动性能具有重要意义。该文以工件台系统的子系统掩模台系统的线管组件为例,以减小线管组件扰动力波动、提高掩模台运动性能为目的,建立了线管组件有限元模型,对线管组件的主要结构参数进行了优化,提出了线管组件优化的一些准则,并进行了实验验证。实验表明:该有限元模型与实验相比的一阶频率误差在10%以内,验证了模型的准确性。仿真实验结果表明:优化后的线管组件L向扰动力波动幅值减小80%。
[Abstract]:The workpiece table of lithography machine is the key subsystem of lithography machine, in which the line tube component is its transmission signal. The disturbing force generated by the wire tube assembly will worsen the ultra-precision motion performance of the workpiece system. Therefore, it is very important to restrain the disturbance force of the wireline tube assembly to improve the motion performance of the workpiece platform system. In this paper, the wireline tube component of the subsystem mask platform system of the workpiece platform system is taken as an example to reduce the disturbing dynamic fluctuation of the wire tube assembly. For the purpose of improving the motion performance of the mask platform, the finite element model of the wire tube assembly is established, the main structural parameters of the line tube assembly are optimized, and some criteria for the optimization of the line tube assembly are put forward. The experimental results show that the first-order frequency error of the finite element model is less than 10%. The simulation results show that the amplitude of L-direction disturbance dynamic fluctuation of the optimized tube assembly is reduced by 80%.
【作者单位】：清华大学机械工程系;
【基金】：国家科技重大专项子项(2012ZX02702006)
【分类号】：TN405
【正文快照】： 集成电路(IC)产业是推动社会信息化和经济发展的核心产业之一[1],光刻机是集成电路制造的最为关键装备,超精密工件台系统是光刻机的核心子系统之一[2-3]。目前,由于直驱式动圈式电机推重比高和无理论推力上限的优点,高端光刻机普遍采用这种驱动结构。运动的通电线圈由于散热和

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