基于干涉曝光技术的LSPR生化传感芯片的研究

发布时间：2018-01-14 19:14

本文关键词：基于干涉曝光技术的LSPR生化传感芯片的研究　出处：《天津工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：局域表面等离子体共振(Localized Surface Plasmon Resonance,LSPR)是由于光波激发导致贵金属体内自由电子发生共振的现象。当入射光照射到金属表面,光波的频率与金属纳米结构的电子频率相同时,会使金属表面电荷振荡。此时金属纳米结构表面的电磁场会极大地增强,使金属纳米结构对其表面附近的物质折射率变化十分敏感。如果将待检测物修饰在金属纳米结构表面,就能够通过测试光谱的变化对待测物进行传感检测。为了制备纳米图形结构,本文搭建了一套劳厄德(Lloyd)干涉曝光系统,成功在2×2cm2的导电玻璃以及硅片衬底上制备出了纳米光栅、点阵以及孔阵等结构。随后通过电子束蒸发,金属剥离(lift-off)等工艺制作出传感性能优异的金属纳米结构,为传感芯片的制备提供了前提条件。本文通过FDTD Solutions软件对制备的金属纳米结构进行仿真,分析了金属纳米颗粒的形状、尺寸以及材料等因素对传感特性的影响。模拟了不同大小的金纳米点阵在不同介质折射率下的光谱特性,结果说明随着折射率的增大,共振波长发生显著位移。这些模拟工作为后期芯片的传感测试提供了借鉴。最后对制备的金属纳米结构进行实际的测试。通过测试结果验证了金纳米颗粒的参数对折射率灵敏度的影响。本文的研究结果表明,对于金纳米点阵结构传感芯片,其传感灵敏度可达533nm/RIU。这为研究高灵敏度的LSPR传感器制作提供了参考,在生化传感领域具有很大的应用价值。
[Abstract]:Local surface plasmon resonance (SPR) localized Surface Plasmon Resonance. LSPRA is a phenomenon that the free electron in precious metal resonates due to the excitation of light wave. When the incident light shines on the metal surface, the frequency of the light wave is the same as the electron frequency of the metal nanostructure. Will make the metal surface charge oscillation. At this time, the metal nanostructure surface electromagnetic field will be greatly enhanced. The metal nanostructures are very sensitive to the change of refractive index near the surface. If the metal nanostructures are modified on the surface of the metal nanostructures. In order to prepare the nanograph structure, a set of Lloyd Lloyd interferometric exposure system is built in this paper. Nanocrystalline gratings, lattice and pore arrays were successfully fabricated on 2 脳 2cm2 conductive glass and silicon substrate, and then vaporized by electron beam. Metal nanostructures with excellent sensing performance were fabricated by metal stripping lift-off process. In this paper, the metal nanostructures were simulated by FDTD Solutions software, and the shape of metal nanoparticles was analyzed. The effects of dimension and material on the sensing characteristics were simulated. The spectral characteristics of gold nanoscale lattice with different sizes were simulated under different refractive index of medium. The results show that the spectral characteristics increase with the increase of refractive index. The resonant wavelength shifted significantly. These simulation work provided a reference for the later chip sensing test. Finally, the fabricated metal nanostructures were tested. The parameters of the gold nanoparticles were verified by the test results. The effect on refractive index sensitivity. The results of this paper show that. For gold nanoscale lattice sensor chip, the sensor sensitivity can reach 533nm / r RIU, which provides a reference for the study of high sensitivity LSPR sensor fabrication. It has great application value in the field of biochemical sensing.
【学位授予单位】：天津工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN40;TP212

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