功率集成器件热载流子退化测试系统设计及实现

发布时间：2018-01-15 02:12

本文关键词：功率集成器件热载流子退化测试系统设计及实现　出处：《东南大学》2016年硕士论文　论文类型：学位论文

【摘要】：功率集成器件作为功率集成电路的主要组成部分,通常工作在高压、大电流等恶劣情况下,因而面临严重的热载流子退化问题,使得器件工作寿命缩短,进而影响整个电路系统的性能。因此,功率集成器件的热载流子退化问题亟需解决,而为了方便、快速的测试并研究其内在退化机理,专用的热载流子退化测试系统的研究开发意义重大。目前,利用各种通用仪器搭建的测试系统,操作繁琐,连线产生的寄生参数干扰严重,不能满足更高层次的测试研究需求。本文根据器件热载流子退化所需的应力设计了动态应力发生模块,可以产生频率、脉宽、幅值和上升下降沿可调的脉冲信号,作为退化的动态应力。同时,为了检测施加应力过程中器件电学参数的退化情况,本文设计了器件电学参数监测模块,实现了应力模式和电学参数测试模式间的自动切换,实时监测并记录器件的电学参数。另外,该测试系统还包含电源模块、基准模块、过压保护模块等,确保测试系统安全稳定工作。测试结果表明：本文设计的测试系统可以产生频率在5kHz-2MHz间可调、脉宽在50ns-1550ns间可调、幅值三档可调的动态脉冲应力,并实现了施加应力过程中监测器件的电学参数,满足了功率集成器件热载流子退化的测试应用需求。
[Abstract]:As the main component of power integrated circuits, power integrated devices usually work in high voltage, high current and other bad conditions, so they face the serious hot carrier degradation problem, which shorten the working life of the devices. Therefore, the hot carrier degradation of power integrated devices needs to be solved, and in order to facilitate the rapid test and study of its inherent degradation mechanism. The research and development of the dedicated hot-carrier degradation test system is of great significance. At present, the test system built with various kinds of universal instruments is cumbersome to operate, and the parasitic parameter interference caused by the connection is serious. The dynamic stress generation module is designed according to the stress of hot carrier degradation, which can generate frequency and pulse width. The pulse signal with adjustable amplitude and rising and descending edge is regarded as the dynamic stress of degradation. In order to detect the degradation of electrical parameters in the process of applying the stress, a monitoring module of electrical parameters of the device is designed in this paper. The automatic switching between stress mode and electrical parameter testing mode is realized, and the electrical parameters of the device are monitored and recorded in real time. In addition, the test system also includes power supply module, reference module, overvoltage protection module and so on. The test results show that the test system designed in this paper can produce adjustable frequency between 5kHz-2MHz and pulse width of 50ns-1550ns. The dynamic pulse stress with three adjustable amplitudes is realized and the electrical parameters of the device are monitored in the process of applying the stress, which meets the requirements of the hot carrier degradation test of the power integrated devices.
【学位授予单位】：东南大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN307

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