曲面基底衍射光学元件的激光直写技术

发布时间：2018-01-17 19:18

本文关键词：曲面基底衍射光学元件的激光直写技术　出处：《中国激光》2017年06期 　论文类型：期刊论文

【摘要】：飞秒激光直写技术(FsLDW)因其优异的三维加工能力、高空间分辨率、低附加损伤等优点被广泛地应用于微纳加工领域,但传统飞秒激光直写技术在加工效率、加工面积和加工精度之间存在矛盾。为了实现高速、大面积、高精度的激光微纳加工,构建了一种由大范围水平位移台和高速旋转台组成的极坐标系飞秒激光直写系统。基于该系统,研究了轴对称样品中心对准方法及曲面曲率校准方法,并在曲面上制备了多阶三维结构。最终完成了在透镜曲面上制备直径为10mm的衍射圆光栅结构,实现了飞秒激光高速、大尺寸、高精度地制备大面积三维结构。该研究为高性能折衍混合光学元件的制备提供了有力的技术支持。
[Abstract]:Femtosecond laser direct-writing (FsLDW) has been widely used in the field of micro-nano machining due to its excellent three-dimensional processing ability, high spatial resolution, low additional damage and so on. However, the traditional femtosecond laser direct-writing technology has a contradiction between machining efficiency, machining area and machining precision. In order to achieve high-speed, large-area, high-precision laser micro-nano machining. A femtosecond laser direct-writing system in polar coordinate system composed of a wide range of horizontal displacement table and a high-speed rotating table is constructed. Based on this system, the method of center alignment of axisymmetric samples and the curvature calibration method of curved surface are studied. Finally, the diffraction circular grating structure with a diameter of 10 mm was fabricated on the lens surface, and the femtosecond laser was achieved at high speed and large size. A large area 3D structure is fabricated with high precision. This study provides a powerful technical support for the fabrication of high performance refractive diffractive hybrid optical elements.
【作者单位】：吉林大学电子科学与工程学院集成光电子学国家重点实验室;西安交通大学机械工程学院;
【基金】：国家自然科学基金(91423102,91323301,61605055,21473076)
【分类号】：TN249
【正文快照】： 0602002-1衍射光学元件因其体积小、质量轻等优点而被广泛应用于航空航天、国防军事、激光技术等领域[1-4]。目前衍射光学元件的制作方法主要有单点金刚石车削[5]、光刻[6]与激光直写[7-8]等方法。其中,单点金刚石车削元件相位轮廓易受金刚石刀具形状的限制;光刻技术存在无法

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