飞秒激光诱导金属银纳米布线加工精度的研究

发布时间：2018-01-19 07:23

本文关键词： 激光加工技术银纳米布线飞秒激光图案化　出处：《吉林大学》2017年硕士论文　论文类型：学位论文

【摘要】：在本文中,我们主要对飞秒激光诱导银离子还原的过程进行了相关研究。通过研究发现,由于激光聚焦的位置处会产生多光子吸收过程,这使得前驱体溶液中的银离子发生了氧化还原反应,从而产生了银的纳米颗粒并沉积在衬底上,因此最终可实现银的纳米布线过程。此外,通过对实验中的加工功率、曝光持续时间、溶液中还原剂种类以及对前驱液硝酸银浓度的调控,可以大大提高银纳米布线的精度。其中,当实验中的还原剂为柠檬酸钠,飞秒激光加工功率为0.26毫瓦,曝光持续时间为250微秒,以及前驱液硝酸银的浓度为0.06摩尔每升的条件下,成功制备出了线宽为93nm的银线,这一成果打破了光学衍射极限的限制,更展示了飞秒激光诱导银布线的高分辨率。通过自制金-铬微电极表征了银纳米线的导电性,并估算出所加工的纳米银线的电阻率只比正常状态下银的电阻率高一个数量级,证明了纳米银线具有较好的导电性。且通过反复实验证明,纳米银线被氧化的表面以及银纳米团簇之间微小缝隙的存在是导致纳米银线电阻率升高的主要因素。此外,通过最大功率超声实验,证明了飞秒激光诱导制备的金属银纳米线具有很好的黏附性。利用本文中经实验验证的最优加工条件,我们通过飞秒激光诱导技术成功制备出了包括大象、兔子、鲨鱼等在内的任意图案化的微纳银结构,展现了飞秒激光诱导技术所具有的任意化,可编程性的突出优势。此外,我们同样利用飞秒激光诱导技术成功制备出了一种催化反应微结构,该结构不仅为微流控系统中气体动力型的潜在应用提供了新的思路,而且为日益发展的集成功能型微器件提供了新的技术参考。本文一共分为四个章节:在第一章中,除了对包括飞秒激光发展历史在内的研究背景进行了相关介绍外,同时还介绍了飞秒激光制备微结构领域内的研究进展;在第二章中,我们介绍了不同的实验条件(加工功率,曝光持续时间,溶液中还原剂的种类,前驱液硝酸银的浓度)对飞秒激光诱导银纳米布线的精度及形貌的影响,并从理论上分析了这些条件是如何影响布线精度的;在第三章中,我们介绍了利用飞秒激光加工技术所制备出的银微结构的极限分辨率及各项性能指标,并制备出了相关的可行性应用器件;第四章则是对本文进行了总结及展望。
[Abstract]:In this paper, we mainly study the process of silver ion reduction induced by femtosecond laser. This led to the redox reaction of silver ions in the precursor solution, resulting in the formation of silver nanoparticles and deposition on the substrate. The precision of silver nanowire can be greatly improved by controlling the processing power, exposure duration, reducing agent type in the solution and the concentration of silver nitrate in the precursor solution. When the reducing agent in the experiment is sodium citrate, the femtosecond laser processing power is 0.26 MW, the exposure duration is 250 microseconds, and the concentration of silver nitrate in the precursor solution is 0.06 mol / L. Silver wire with a linewidth of 93 nm has been successfully prepared, which breaks the limit of optical diffraction limit. The high resolution of femtosecond laser-induced silver wiring was also demonstrated. The conductivity of silver nanowires was characterized by a self-made gold-chromium microelectrode. It is estimated that the resistivity of the nanocrystalline silver wire is only one order of magnitude higher than that of the normal silver wire, which proves that the nanocrystalline silver wire has good electrical conductivity. The existence of the oxidized surface of the silver nanowires and the existence of tiny gaps between the silver nanoclusters are the main factors leading to the increase of the resistivity of the nanocrystalline silver wires. In addition, the maximum power ultrasonic experiments are carried out. It is proved that the silver nanowires prepared by femtosecond laser have good adhesion. Using the optimal processing conditions verified by experiments in this paper we successfully prepared including elephants by femtosecond laser induced technology. Rabbit, shark, and so on, the arbitrary pattern of micro-silver structure, show the femtosecond laser induction technology with arbitrary, programmable outstanding advantages. We have also successfully prepared a catalytic reaction microstructure using femtosecond laser induction technology, which not only provides a new idea for the potential application of gas dynamic type in microfluidic system. And it provides a new technical reference for the increasingly developed integrated functional microdevices. This paper is divided into four chapters: in the first chapter. Besides introducing the research background including the history of femtosecond laser, the research progress in the field of femtosecond laser fabrication microstructures is also introduced. In the second chapter, we introduce different experimental conditions (processing power, exposure duration, and kinds of reducing agents in solution). The influence of the concentration of silver nitrate in precursor solution on the accuracy and morphology of silver nanowires induced by femtosecond laser is analyzed theoretically. In the third chapter, we introduce the limit resolution and performance index of silver microstructures prepared by femtosecond laser processing technology, and fabricate the relevant feasible application devices. Chapter 4th is the summary and prospect of this paper.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN249

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