C波段双层MEMS滤波器的设计

发布时间：2018-01-19 18:54

本文关键词： MEMS 带通滤波器交指结构小型化　出处：《微波学报》2016年S1期 　论文类型：期刊论文

【摘要】：微波滤波器作为通信、雷达等系统中重要的选频元件,其性能好坏将直接影响整个通信系统的性能[1]。滤波器的高性能、小型化是目前主要的研制目标。本文介绍了C波段双层微机械(Micro-Electro-Mechanical System,MEMS)滤波器,采用抽头交指结构,采用电感耦合等离子(Inductively Coupled Plasma,ICP)深硅刻蚀和金-金键合工艺实现封闭谐振腔,大大减少了体积和辐射损耗。滤波器中心频率为4.1GHz,,相对带宽15%,驻波小于1.5,3.2GHz5GH处抑制大于45 d B。芯片尺寸为7 mm×7.8 mm×0.8 mm。本文给出了该滤波器的具体制作流程。实物测试结果表明,获得的MEMS滤波器的测试结果与仿真结果基本一致。
[Abstract]:Microwave filter is an important component in communication, radar and other systems. Its performance will directly affect the performance of the whole communication system. [1. High performance of filter. Miniaturization is the main research target at present. This paper introduces a C-band micro-electromechanical micro-mechanical system MEMS filter. Using tap cross finger structure, inductively inductively Coupled plasma-ICP-based deep silicon etching and gold-gold bonding process to achieve a closed resonator. The center frequency of the filter is 4.1 GHz, the relative bandwidth is 15, and the standing wave is less than 1.5. 3.2GHz 5GH was inhibited more than 45 dB. The chip size was 7 mm 脳 7.8 mm 脳 0.8. In this paper, the process of making the filter is given. The physical test results show that. The measured results of the MEMS filter are in good agreement with the simulation results.
【作者单位】：成都亚光电子股份有限公司微波毫米波研究所;电子科技大学物理电子学院;
【分类号】：TN713
【正文快照】： 引言传统的微波C波段滤波器,大多采用微带交指结构,由于是开放结构,所以辐射损耗较大,而且谐振单元依赖体积较大。很难达到滤波器所要求的高性能、小型化。这里介质基片采用高阻硅介电常数大可以缩小体积,双层硅基片形成封闭腔体,辐射损耗大大减少。MEMS技术是一种高精度多层

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