飞秒激光在甘油介质中烧蚀恒弹合金的规律研究

发布时间：2018-01-20 23:56

本文关键词： 飞秒激光液体介质恒弹性合金电离点烧蚀规律　出处：《应用激光》2017年03期 　论文类型：期刊论文

【摘要】：为了深入研究恒弹合金的飞秒激光烧蚀工艺,探索了飞秒激光在甘油介质中对恒弹性合金进行烧蚀的规律。因为激光烧蚀诱导产生的气泡在液体辅助烧蚀中扮演了一个重要角色,因此在实验中使用了粘度较大的甘油溶液,以研究气泡对于烧蚀规律的影响。在进行烧蚀时,采用不同的离焦量分别打点,以研究溶液介质对于激光聚焦点位置的影响。实验表明,在甘油溶液介质中对样品表面烧蚀时,孔深的变化比之在空气中烧蚀差别很大,在离焦量由正到负的过程中出现了两个孔深峰值,分别位于正负离焦量区间,并且在零离焦量附近达到极小值。而孔径的变化则基本呈现聚焦点位置越深入样品表面内部越大的趋势。根据对实验过程和结果的观察分析,这主要是由于气泡对激光烧蚀能力产生了很大的影响,从而导致了液体辅助烧蚀与在空气中烧蚀截然不同的结果。
[Abstract]:In order to deeply study the femtosecond laser ablation process of the constant elastic alloy. The law of ablation of constant-elastic alloy by femtosecond laser in glycerol medium is explored because the bubble induced by laser ablation plays an important role in liquid-assisted ablation. Therefore, glycerol solution with high viscosity was used in the experiment to study the effect of bubble on ablation law. In order to study the effect of solution medium on laser focal point, the experimental results show that when the sample surface is ablated in glycerol solution, the variation of pore depth is more different than that in air. In the process of defocusing from positive to negative, there are two peak values of hole depth, respectively, in the range of positive and negative defocus. And the minimum value is reached near zero defocus, and the change of pore size basically shows the trend that the focal point is deeper into the surface of the sample. According to the observation and analysis of the experimental process and results. This is mainly due to the effect of bubbles on laser ablation ability, which leads to a very different effect between liquid assisted ablation and air ablation.
【作者单位】：中南大学高性能复杂制造国家重点实验室;中南大学机电工程学院;
【基金】：国家自然科学基金资助项目(项目编号:51475481,51475482,51335011) 教育部“新世纪人才支持计划”资助项目(项目编号:NCET-12-0548)
【分类号】：TG135.2;TN249
【正文快照】： 0引言恒弹性合金,是一种具有高弹性模量、高强度和低弹性模量温度系数以及良好的波速一致性的合金材料,因其优异的性能而广泛应用于各个高精密需求领域中[1]。由于这种应用领域的高精密性,因而对于恒弹合金的加工与制造也有着极为精密的要求。在这种背景下,传统机械加工方法往

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