硅基太赫兹波导定向耦合器的设计及制备

发布时间：2018-01-21 01:42

本文关键词： 定向耦合器太赫兹 MEMS 深硅刻蚀超宽带　出处：《中北大学》2017年硕士论文　论文类型：学位论文

【摘要】：太赫兹定向耦合器作为可以实现定向功率分配的关键无源器件,在微波、毫米波以及通信领域具有广泛的应用。亚毫米波波导型器件和平面传输线器件相比,具有较低的损耗,更高的功率处理能力,且易于与测量系统和其他固态系统互连的优点,成为国内外探究的热点。本文通过对波导定向耦合器进行探索研究,设计出一种结构紧凑、超宽带、耦合强、高方向性的太赫兹波导定向耦合器,并利用MEMS工艺完成了加工。在总结国内外波导结构以及波导定向耦合器研究和发展趋势的基础上,从定向耦合器的设计理论出发,利用上、下排列的波导之间的多个耦合孔来实现功率分配,通过软件HFSS进行模拟仿真,设计出了中心频率为400 GHz,带宽为150 GHz的太赫兹多孔耦合型波导定向耦合器,耦合孔有“十字形”和“三角形”两种,仿真曲线可以看出该结构具备良好的传输性能。考虑到测试系统的连接方式,设计了三种拓扑结构分别对应测试的三个参数:耦合度、回波损耗、隔离度。以高阻硅为结构材料,基于深硅刻蚀工艺和键合工艺完成了太赫兹波导定向耦合器的加工,并利用磁控溅射和微电镀实现了波导定向耦合器的金属化。定向耦合器封装于以硅为材料,尺寸为6 mm×6 mm×1.36 mm的单元中,设计了定向耦合器的配套夹具来进行测试,测试和仿真结果基本一致。本文成功完成了太赫兹波导定向耦合器的设计和制备,突破了传统波导定向耦合器两波导处于同一平面内的局限,利用多个小孔耦合的形式,提高了定向耦合器的工作带宽和方向性,对后续太赫兹系统的探讨和发展具有重大意义。
[Abstract]:Terahertz directional coupler, as a key passive device to realize directional power distribution, has been widely used in microwave, millimeter wave and communication fields, compared with submillimeter wave waveguide device and planar transmission line device. With the advantages of low loss, higher power processing capability and easy interconnection with measurement systems and other solid-state systems, it has become a hot topic at home and abroad. In this paper, waveguide directional couplers are studied. A compact ultra-wideband (UWB) THz waveguide directional coupler with strong coupling and high directivity is designed. On the basis of summarizing the research and development trend of waveguide structure and waveguide directional coupler at home and abroad, this paper starts from the design theory of directional coupler and makes use of it. The power distribution is realized by several coupling holes between the waveguides arranged in the bottom. The center frequency is designed to be 400 GHz through the simulation of software HFSS. THz porous waveguide directional coupler with a bandwidth of 150 GHz has two kinds of coupling holes: "cross" and "triangle". The simulation curve shows that the structure has good transmission performance. Considering the connection mode of the test system, three topologies are designed to correspond to the three parameters of the test: coupling degree, echo loss. Isolation. Based on deep silicon etching and bonding process, the THz waveguide directional coupler is fabricated using high resistance silicon as the structure material. The metallization of waveguide directional coupler is realized by magnetron sputtering and micro-electroplating. The directional coupler is encapsulated in a cell of 6 mm 脳 6 mm 脳 1.36 mm in size. The matching fixture of the directional coupler is designed for testing, and the test results are basically consistent with the simulation results. In this paper, the design and fabrication of the THz waveguide directional coupler are successfully completed. It breaks through the limitation that two waveguides of traditional waveguide directional coupler are in the same plane, and improves the working bandwidth and directivity of directional coupler by using multi-hole coupling. It is of great significance for the discussion and development of terahertz system.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN622.2

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