多轴镜组分光平行性与分光效率检测技术研究

发布时间：2018-01-22 06:57

本文关键词： 多轴镜组光束平行性分光效率　出处：《哈尔滨工业大学》2016年硕士论文　论文类型：学位论文

【摘要】：近年来,激光干涉测量技术由于具有精度高、速度快和测量范围大等优势,在科学研究和工业生产之中广泛应用,尤其是具有多轴测量能力的激光干涉仪,是以光刻机为代表的微电子加工装备和高端超精密加工装备中核心系统。多轴激光干涉仪中集众多光学器件于一体的干涉镜组是其核心部件,通过对光学器件的集成,缩小了系统体积并避免了装调过程,给应用带来方便,但干涉镜组定型后不易调节,装配定型过程中会引入的分光不平行及分光效率不理想,成为激光干涉仪重要的误差源,限制了激光干涉仪角度测量和长度测量精度的提高。本课题主要针对上述问题,对干涉镜组分光不平行及分光效率不理想的检测方法开展研究;在讨论了已有镜组分光平行性检测及分光效率检测方法的优缺点的基础上;研究了基于差动离焦检测的平行性检测方法,以及基于非饱和状态CCD检测光强的分光效率检测方法,建立相关测量模型,提出了可以兼顾平行性与分光效率的整体检测方案,最终搭建检测系统并完成了对镜组分光平行性及分光效率两个参数的检测。课题的主要研究内容如下:(1)提出了一种针对多轴镜组分光平行性的检测方法,通过两个对称于准直物镜焦平面放置的CCD,检测镜组分光光束的空间位置以实现平行性的检测;基于非饱和状态CCD检测等效光强,实现镜组分光效率的检测,建立起了适用于单轴及多轴差分镜组的检测模型;并在平行性及分光效率检测模型的基础上设计出一套可兼顾检测两个参数的整体检测方案。(2)对CCD轴向位置误差、倾角误差、分光棱镜位置误差对平行性检测的影响规律进行了系统分析,得出引起平行性检测误差的各器件安装误差容限,在平行性检测相对误差小于2%时,CCD位置误差为(-0.01mm,0.01mm),倾角误差为(-10°,10°);同时得出最佳的系统安装方案。(3)针对上述检测方案,完成了系统硬件及软件的设计,针对建立的检测模型及测量精度与测量范围需求,逐一进行了关键器件选型,并设计制作了分光棱镜、CCD装配的机械结构;使用LabVIEW设计了系统软件,包括控制、采集、数据处理功能,可实现了平行性及分光效率的多轴兼顾测量。(4)搭建了测量系统,对系统性能进行了实验;实验表明,搭建的系统可以完成镜组分光效率的检测,分光效率检测的重复性为0.4%;实验还表明,搭建的系统可以实现多轴光束的平行性同时测量,避免了分时测量的误差,采用自准直仪进行比较测试,分光平行性与传统聚焦检测方法相比,平行性检测的稳定性由0.6″提升至0.1″,分辨力达到0.2″,测量重复性为0.04″,上述指标满足高精度多轴镜组对平行性和分光效率的检测需求。
[Abstract]:In recent years, because of its high precision laser interferometry technology, fast speed and wide measurement range and other advantages, is widely used in scientific research and industrial production, especially with multi axis laser interferometer measurement capability, is the core system of ultra precision machining in lithography machine as the representative of the microelectronic processing equipment and high-end equipment. Axis laser interferometer in many optical devices in an interference lens group is the core component, through the integration of optical devices, reduce the volume of the system and avoid the alignment process, bring convenience to the application, but the group after setting mirror interference is not easy to adjust, assembly shaping process will introduce the light and not parallel optical efficiency is not ideal, has become an important source of error of laser interference instrument, limits the laser interferometer angle measurement and length measurement precision is improved. This topic mainly aiming at the above problems, the interference component of optical mirror Study on detection method of parallel and light efficiency is not ideal; based on the existing advantages and disadvantages of optical lens is divided into parallel detection and optical efficiency of the detection method; research parallel detection method based on the differential detection of focus from, and based on the optical efficiency of detection method of unsaturated CCD photometric detection the establishment of measurement model proposed can be both parallel and light efficiency of the whole detection scheme, and ultimately build detection system and completed the light extraction efficiency and parallel detection of two parameters of lens group. The main research contents of this paper are as follows: (1) put forward a multi axis the mirror component light parallel detection method, through two symmetrical to the collimating lens focal plane placed CCD, space position detection mirror component of light beam to achieve the detection of parallelism; based on non saturation light intensity detection CCD equivalent, realize Detection of mirror component light efficiency, set up suitable for single and multi axis differential group shot detection model; and a design can take into account the overall detection method of two parameters based on parallel and light efficiency detection model. (2) on the CCD axial position error, angle error the law, prism position error of parallelism detection was analyzed. It is concluded that the installation error tolerance device parallel error detection, in parallel detection of the relative error is less than 2%, the position error is CCD (-0.01mm, 0.01mm), as the angle error (-10 degrees, 10 degrees); at the same time the best installation program system. (3) according to the above detection scheme, completed the design of hardware and software of the system, to establish the detection model and the measurement precision and measurement range requirements, one by one key component selection, design and making the prism assembly CCD Mechanical structure; system design using LabVIEW software, including acquisition, control, data processing function, can realize the parallel and light efficiency of multi axis balance measurement. (4) to build a measurement system, the performance of the system experiment; experimental results show that the built system can complete mirror component light detection efficiency the repeatability, optical efficiency of detection was 0.4%; the experiments also showed that the built system can realize multi axis parallel beam measurement at the same time, the error measurement is avoided, the autocollimator comparison test, splitting parallel with the traditional focus detection method, parallel detection stability by 0.6 "to enhance the resolution of 0.1", 0.2 ", 0.04" measurement repeatability, the above indexes meet the high precision multi axis mirror group on the test requirements of parallelism and light efficiency.

【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN249

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