正交移相干涉法测量液晶衍射光栅调制相位

发布时间：2018-01-25 01:45

本文关键词： 液晶衍射光栅波前相位检测琼斯矩阵 PZT相移 Zernike多项式　出处：《中国科学院大学学报》2017年01期 　论文类型：期刊论文

【摘要】：液晶衍射光栅在电控下能够实现光束控制和偏转,与传统的光束控制器件相比具有稳定性强、速度快、体积和质量小等优点。对液晶衍射光栅的光波调制相位分布进行精密测量是该器件研制过程的重要环节和评价其性能的关键手段。提出正交移相干涉测量液晶衍射光栅调制相位分布的方法。通过透射式相位板的对比实验对测量方法的可行性和准确性进行验证,分析测量精度和误差。使用该方法实现对液晶光栅相位分布的测量。实验表明,此方法简单、快速、可靠,能够准确测量出液晶衍射光栅±2级的波前调制相位信息。
[Abstract]:The liquid crystal diffraction grating can realize beam control and deflection under electronic control, which is more stable and faster than the traditional beam controller. The precise measurement of the optical wave modulation phase distribution of the liquid crystal diffraction grating is an important step in the development of the device and the key means to evaluate its performance. The orthogonal phase shift interferometry is proposed to measure the liquid crystal diffraction. The feasibility and accuracy of the measurement method are verified by the contrast experiment of the transmission phase plate. The measurement accuracy and error are analyzed. The phase distribution of liquid crystal grating is measured by this method. The experiment shows that the method is simple, fast and reliable. The phase information of the wavefront modulation of the liquid crystal diffraction grating 卤2 order can be accurately measured.
【作者单位】：电子科技大学光电信息学院;
【基金】：国家自然科学基金(61308062)资助
【分类号】：TN256
【正文快照】： Zhao Y M,Yang R F,Yang C P.Phase distribution measurement of liquid crystal optical phased array based onorthogonal phase shift interferometry[J].Journal of University of Chinese Academy of Sciences,2017,34(1):32-37.液晶衍射光栅(liquid crystal optical ph

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