软刻蚀用母模板的聚焦离子束刻蚀技术制备研究

发布时间：2018-01-30 20:21

本文关键词： 聚焦离子束刻蚀技术软刻蚀技术三维加工聚二甲基硅氧烷模板　出处：《西南科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：聚二甲基硅氧烷(polydimethylsiloxane,以下简称PDMS)软模板在生物医药、物理化学等领域具有重要的应用价值。而PDMS软模板的制备源于母模板结构的制造,因此制备出高分辨率、精细的三维母模板结构是PDMS软模板结构的关键。一般以光刻胶、Si和Si O2等作为母模板结构,目前加工母模板结构的方法有干涉光刻技术和电子束光刻技术等。但是这些方法制备PDMS软刻蚀用母模板工艺复杂,需要旋涂光刻胶、曝光、显影、定影和反应离子束刻蚀等步骤,并且其加工的结构一般为准三维结构。基于上述情况,本文提出利用聚焦离子束刻蚀技术制备PDMS软刻蚀用母模板,并在Si基底上制备出15?m×15?m的轮廓清晰的三维结构母模板,三甲基氯硅烷作为抗粘连层旋涂于Si基底表面,其后旋涂PDMS预聚物复制模铸出与Si基底表面图案互补的三维结构。通过接触角测量仪对Si基底表面疏水性能和用AFM对PDMS样品表面形貌进行表征。研究结果表明,特征图形及小尺寸结构都得到了很好的转移,15?m×15?m结构中小尺寸圆柱直径713.56nm,高度51.39nm也得到很好的倒模。其中用庚烷稀释PDMS预聚物,倒模出的PDMS软模板结构纵横比达到1:1。该方法相对于传统软刻蚀用母模板制备技术,加工的三维结构具有操作步骤简单、制备周期短的特点,是一种有效的制备软刻蚀母模板方法。聚焦离子束刻蚀技术在PDMS软刻蚀用母模板结构中的成功制作,有助于进一步探索其在更小尺寸及微纳米结构器件中的应用。
[Abstract]:Polydimethylsiloxane polydimethylsiloxane (hereinafter referred to as PDMS) soft template in biomedicine. Physical chemistry and other fields have important application value, and the preparation of PDMS soft template originated from the manufacture of mother template structure, so the preparation of high resolution. Fine 3D master template structure is the key of PDMS soft template structure. Generally, photoresist Si and Sio 2 are used as master template structure. At present, the methods of fabricating the structure of mother template include interference lithography and electron beam lithography, etc. But these methods are very complicated for preparing PDMS soft etching, which require spin coated photoresist, exposure and development. Fixing and reactive ion beam etching and so on, and the structure of the processing is generally quasi-three-dimensional structure. Based on the above situation, this paper proposed the use of focused ion beam etching technology to prepare the mother template for PDMS soft etching. 15? M 脳 15? M has a clear three-dimensional structure template and trimethylchlorosilane as an anti-adhesion layer is spin-coated on the surface of Si substrate. After spin-coated PDMS prepolymer, the 3D structure complementary to the surface pattern of Si substrate was molded out. The hydrophobic properties of Si substrate surface and the surface morphology of PDMS sample were measured by contact angle measuring instrument and AFM respectively. Characterization. The results show that. Both the feature figure and the small size structure have been well transferred. M 脳 15? The diameters of small and medium size cylinders with m structure are 713.56 nm and the height is 51.39 nm. The PDMS prepolymer is diluted with heptane. The aspect ratio of inverted PDMS soft template structure is 1: 1.Compared with the traditional mother template preparation technology, the 3D structure fabricated by this method has the characteristics of simple operation steps and short preparation period. It is an effective method to prepare soft etching mother template. Focusing ion beam etching technology is successfully made in the structure of PDMS soft etching mother template. It is helpful to further explore its application in smaller size and micro-nano structure devices.
【学位授予单位】：西南科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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