基于天然DNA自组装图案的尺寸可控微影技术

发布时间：2018-02-06 07:46

本文关键词： 微加工微影技术 DNA图案可伸缩PAM印章 DNA双螺旋结构　出处：《浙江理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：微加工—因其在半导体工业、微流体设备、生物传感器、组织工程以及药物运输等领域的巨大应用价值而受到广泛关注。传统微加工技术中应用最普遍地是光刻技术，因受到光衍射地限制，在制备尺寸小于100nm的图案时“举步维艰”。为克服此困难，多种微影技术—如电子束光刻、离子束光刻以及蘸笔纳米光刻相继出现，但高成本和低产量依旧束缚着它们地发展。近期，随着低成本和高产出的软光刻技术和纳米压印技术地出现，引起学界瞩目。然而作为这两类新技术中最基本和最关键部分的图案印章，其制备过程在技术上相对复杂，常需PDMS、石英、硅等特殊材料地参与；且印章一旦被制备出来，表面图案的特征尺寸也同时被固定下来而无法改变。针对以上不足，本文概念性地提出了一种简便又可靠的策略即基于天然DNA自组装图案制备尺寸可控的PAM印章。通过位于特定几何空间的天然DNA溶液蒸发自组装，在PMMA表面形成了高度规整的DNA平行列阵图案。光学显微镜观测表明在宏观尺度下图案呈均匀分布；AFM结果证明单根DNA纳米束呈线性排列，高度和宽度分别为90.5±30.8nm和878.8±22.29nm。基于表面粗糙度的分析结果，，选择UPR作为转移材料制备DNA图案阴模，利用PAM复制阴模图案，通过可控蒸发和膨胀过程，完成尺寸可控PAM印章地制备。经SEM和AFM观察发现：PAM印章的图案尺寸与母版DNA图案相比，可实现0.25%至200%范围内的自定义调控；在印章充分缩小后特征尺寸的高和宽分别减小至35.2±4.11nm和363.3±17.66nm。本文还做了如下与DNA相关的辅助工作：基于分子设计，讨论了DNA双螺旋结构参与调控PHPMA形貌的机理。FTIR及1H-NMR结果表明成功合成了AUTEAB；通过制备DNA/AUTEAB复合体，成功将DNA引入HPMA聚合体系，利用自由基溶液聚合获得绒球形PHPMA，酸洗后绒球变为多面体，伴随绒线结构消失。SEM观察显示：绒球的平均粒径0.79μm，绒线宽度17.53nm，而多面体粒径缩小为0.65μm。基于理论计算和UV光谱结果建立绒线结构的空间模型，得到的模拟值与实际吻合，在确认绒线结构为DNA复合体的同时证明了模型的有效性。本文提出得新颖策略即尺寸可控微影技术，为解决大型集成电路上图案化元件地可控与匹配组装和实现图案可伸缩性纳米微影技术提供了一个新的思路，极有希望在纳米科技未来地发展中做出贡献。
[Abstract]:Micromachining-for its use in the semiconductor industry, microfluid devices, biosensors. Wide attention has been paid to tissue engineering and drug transportation. The traditional micromachining technology is widely used in photolithography, which is limited by light diffraction. To overcome this difficulty, a variety of Weiying techniques such as electron beam lithography, ion beam lithography and dip-pen nanocrystalline lithography have emerged. But high cost and low production still constrain their development. Recently, with the emergence of low cost and high output soft lithography technology and nanoimprint technology. However, as the most basic and key part of these two new technologies, the preparation process of the seal is relatively complicated, and it often needs PDMS, quartz, silicon and other special materials to participate. And once the seal is prepared, the characteristic size of the surface pattern is fixed and cannot be changed. In view of the above shortcomings, a simple and reliable strategy is proposed in this paper, that is, a controllable size PAM seal based on a natural DNA self-assembled pattern. Self-assembly is performed by evaporation of natural DNA solutions located in a particular geometric space. A highly structured DNA parallel array pattern was formed on the surface of the PMMA. The optical microscope observation showed that the pattern was uniformly distributed at the macro scale. The results of AFM show that the single DNA nanowires are linearly arranged, the height and width are 90.5 卤30.8 nm and 878.8 卤22.29 nm, respectively. Based on the results of surface roughness analysis, UPR was selected as the transfer material to prepare DNA pattern negative mold. PAM was used to replicate the DNA pattern, and the process of evaporation and expansion was controlled. Through SEM and AFM observation, we found that the pattern size of PAM seal was compared with that of master DNA. Can realize the custom control in the range from 0.25% to 200%; The height and width of the characteristic size were reduced to 35.2 卤4.11nm and 363.3 卤17.66nm, respectively. In this paper, we also do the following auxiliary work related to DNA: based on molecular design. The mechanism of DNA double helix structure involved in regulating the morphology of PHPMA was discussed. FTIR and 1H-NMR results showed that the auto was synthesized successfully. Through the preparation of DNA/AUTEAB complex, DNA was successfully introduced into the HPMA polymerization system, and the DNA was prepared by free radical solution polymerization. After acid washing, the ball became polyhedron. With the disappearance of the fiber structure, SEM observation showed that the average diameter of the ball was 0.79 渭 m and the width of the wool was 17.53 nm. The particle size of polyhedron was reduced to 0.65 渭 m. Based on the theoretical calculation and UV spectrum results, the spatial model of the suede structure was established, and the simulated values were in agreement with the actual results. The validity of the model is proved by confirming the suede structure as DNA complex. In this paper, a novel strategy, the size controllable Weiying technique, is proposed, which provides a new idea for solving the controllable and matching assembly of patterned elements on large scale integrated circuits and the realization of pattern scalability nano Weiying technology. It is very promising to contribute to the future development of nanotechnology.
【学位授予单位】：浙江理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7;O629.74

【共引文献】