热释电探测器单元结构仿真研究

发布时间：2018-02-10 20:16

本文关键词： 热释电单元探测器仿真研究结构优化光学吸收热释电电流　出处：《电子科技大学》2017年硕士论文　论文类型：学位论文

【摘要】：热释电探测器是一种热探测器,是利用红外线的热效应及材料的热释电效应来测量红外辐射能量的传感器。由于其具有室温探测、无需外接偏置、探测率高、可靠性高、响应光谱宽、响应速度快等优点,被广泛地应用于军事和民用的各个领域。本文设计热释电单元探测器敏感单元结构,考虑应用背景为背景辐射测量。热释电探测器的性能表现受以下几个因素的影响:红外辐射的吸收、热学温升特性和力学机械稳定性等。为了研究热释电探测器的相关性能,本文采用IntelliSuite微机电有限元仿真分析软件构建了基于敏感元面积为1200μm×1200μm的三种敏感单元结构的三维有限元模型。仿真分析了不同支撑柱结构参数对热释电探测器热学性能和力学性能的影响,重点分析支撑柱结构形状和接触面积大小对热释电探测器性能的影响,得到最优化热释电探测器敏感单元结构参数。利用Essential Macleod光学薄膜仿真分析软件分析红外吸收膜对热释电探测器红外辐射吸收性能的影响。通过控制变量法改变吸收膜系中各膜层厚度,仿真器件辐照吸收,得到最优化热释电探测器吸收膜系条件。得出膜系吸收率主要受吸收层厚度影响,钽酸锂晶体层的厚度主要影响吸收率曲线的峰值位置。当敏感单元结构吸收层采用10nm镍铬金属吸收层、钽酸锂晶片为9.5μm、反射层采用200nm镍铬金属层情况下,在实验波段14~16μm波段内辐射吸收最高。并针对小角度入射情况进行了膜系吸收情况分析仿真实验。本文最后根据对热释电探测器热学、力学、光学性能分析的结果,得出一种性能较好的热释电探测器敏感单元结构。加载经过系统地计算得出的热流密度。提取了此结构探测器敏感元各温升区域的温升曲线,计算这种结构条件下从温升开始到热平衡时的平均热释电电流输出。并进行了误差分析。进一步预估热释电探测器性能,对热释电探测器的结构设计有着重要的参考意义。
[Abstract]:Pyroelectric detector is a kind of thermal detector, which uses infrared thermal effect and material pyroelectric effect to measure infrared radiation energy. Because of the advantages of wide response spectrum and fast response speed, it has been widely used in military and civil fields. In this paper, the sensitive unit structure of pyroelectric unit detector is designed. The performance of pyroelectric detectors is affected by the absorption of infrared radiation, the characteristics of thermal temperature rise and mechanical and mechanical stability, etc. In order to study the correlation energy of pyroelectric detectors, In this paper, a three-dimensional finite element model of three kinds of sensitive element structures based on the sensitive element area of 1200 渭 m 脳 1200 渭 m is constructed by using the IntelliSuite software of finite element analysis. The pyroelectric detectors with different structural parameters of supporting columns are simulated and analyzed. Effects of properties and mechanical properties, The influence of structure shape and contact area of support column on the performance of pyroelectric detector is analyzed. The optimum structure parameters of pyroelectric detector sensitive unit were obtained. The influence of infrared absorption film on infrared radiation absorption property of pyroelectric detector was analyzed by Essential Macleod optical thin film simulation analysis software. The absorption was changed by controlling variable method. The thickness of each film in the film collection system, The optimum conditions of absorption film system of pyroelectric detector are obtained by simulating the radiation absorption of the device, and it is concluded that the absorption rate of the film system is mainly affected by the thickness of the absorption layer. The thickness of lithium tantalate crystal layer mainly affects the peak position of absorptivity curve. When the absorption layer of sensitive unit structure is 10nm Ni-Cr metal absorption layer, the lithium tantalate wafer is 9.5 渭 m, the reflection layer is 200nm Ni-Cr metal layer. The radiation absorption is the highest in the experimental band of 14 ~ 16 渭 m. A simulation experiment is carried out to analyze the absorption of the film system under the condition of small angle incidence. Finally, based on the results of thermal, mechanical and optical properties analysis of pyroelectric detectors, A sensitive unit structure of pyroelectric detector with good performance is obtained. The temperature rise curves of each temperature rise region of the sensitive element of the detector are extracted by loading the heat flux density calculated systematically. The average pyroelectric current output from the beginning of temperature rise to thermal equilibrium is calculated under this kind of structure condition, and the error analysis is carried out. The further prediction of the performance of pyroelectric detector has important reference significance for the structural design of pyroelectric detector.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN215

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